红外与激光工程, 2021, 50 (12): 20210424, 网络出版: 2022-02-09  

显微激光诱导电流技术研究进展 下载: 546次

Research progress of laser-beam-induced current microscopy technology
作者单位
1 东南大学 电子科学与工程学院 信息显示与可视化国际合作实验室,江苏 南京 210096
2 东南大学 仪器科学与工程学院 微惯性仪表与先进导航技术教育部重点实验室,江苏 南京 210096
3 东南大学苏州校区 苏州市金属纳米光电技术重点实验室,江苏 苏州 215123
摘要
随着光电器件的研究步入微米/纳米尺度,显微激光诱导电流(LBIC)技术作为一种半导体器件的无损、快速、可成像的表征技术得到迅速发展。显微LBIC技术可表征局域光照激励下器件的光电转换性能,起初被用于检测器件中的不均匀性或缺陷。近年来,将显微LBIC技术与其他显微成像技术相关联,进行器件多物理参量的综合表征,为研究微纳尺度上的材料-结构-器件性能关系提供了有效手段。基于这一表征手段的进步,光伏器件中微观晶体结构与性能的关系研究、全新机理的低维光伏/探测器件研究、以及微纳结构的光伏/探测增强研究等均得到了蓬勃发展。文中综述了显微LBIC技术的研究进展,首先介绍显微LBIC的基本模型及分类,随后聚焦于LBIC与其他多种显微成像的关联表征技术,并探讨该类技术在光伏器件和光电探测器件研究方面的应用。最后展望了显微LBIC及其关联成像技术的未来发展方向。
Abstract
As the research of optoelectronic devices has stepped into the micro/nano scale, the laser-beam-induced current (LBIC) microscopy technology has developed rapidly as a non-destructive, fast, and imageable characterization technology for semiconductor devices. LBIC microscopy enable studying for photoelectric conversion performance of devices under local illumination excitation, and is initially used to detect inhomogeneities or defects in the devices. In recent years, the LBIC microscopy technology has been correlated with other microscopic imaging technologies to perform comprehensive characterization of the multi-physical parameters of the device, which provides an effective strategy for studying the relationship between material-structure-device performance at the micro-nano scale. Based on the advancement of this characterization strategy, researches on the relationship between microscopic crystal structure and performance in photovoltaic devices, new mechanisms of low-dimensional photovoltaics and detection devices, and micro/nanostructure for photovoltaics and photodetection enhancement have all been vigorously developed. Herein, the research progress of LBIC microscopy was reviewed, firstly the basic model and classification of LBIC microscopy were introduced, then the technology and its development in correlation with other types of microscopic imaging were focused on. And further the application of this type of technology in photovoltaic devices and photodetectors was discussed. At last, future development directions of LBIC microscopy and the correlated microscopic imaging technology were prospected.

吕磊, 苏丹, 杨毅, 王善江, 周桓立, 刘肇国, 张彤. 显微激光诱导电流技术研究进展[J]. 红外与激光工程, 2021, 50(12): 20210424. Lei Lv, Dan Su, Yi Yang, Shanjiang Wang, Huanli Zhou, Zhaoguo Liu, Tong Zhang. Research progress of laser-beam-induced current microscopy technology[J]. Infrared and Laser Engineering, 2021, 50(12): 20210424.

引用该论文: TXT   |   EndNote

相关论文

加载中...

关于本站 Cookie 的使用提示

中国光学期刊网使用基于 cookie 的技术来更好地为您提供各项服务,点击此处了解我们的隐私策略。 如您需继续使用本网站,请您授权我们使用本地 cookie 来保存部分信息。
全站搜索
您最值得信赖的光电行业旗舰网络服务平台!