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2018 Vol.28, Issue 2 Preview Page
Effect of Li-Incorporation on the Properties of ZnO Thin Films Deposited by Ultrasonic-Assisted Spray Pyrolysis Deposition Method

초음파 분무 열분해법에 의해 성장된 ZnO 박막의 특성에 미치는 Li 첨가의 영향

In Sub Han
,
Il-Kyu Park†
한 인섭
,
박 일규†
Department of Materials Science and Engineering, Seoul National University of Science and Technology, Seoul 01811, Republic of Korea
서울과학기술대학교 신소재공학과
†Corresponding author : pik@seoultech.ac.kr (I.-K. Park, Seoul Nat’l Univ. of Sci. Tech.)
February 2018. pp. 101-107
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Abstract

Li-incorporated ZnO thin films were deposited by using ultrasonic-assisted spray pyrolysis deposition (SPD) system. To investigate the effect of Li-incorporation on the performance of ZnO thin films, the structural, electrical, and optical properites of the ZnO thin films were analyzed by means of X-ray diffraction (XRD), field-emssion scanning electron microscopy (FE-SEM), Hall effect measurement, and UV-Vis spectrophotometry with variation of the Li concentraion in the ZnO sources. Without incorporation of Li element, the ZnO surface showed large spiral domains. As the Li content increases, the size of spiral domains decreased gradually, and finally formed mixed small grain and one-dimensional nanorod-like structures on the surface. This morphological evolution was explained based on an anti-surfactant effect of Li atoms on the ZnO growth surface. In addition, the Li-incorporation changed the optical and electrical properties of the ZnO thin films by modifying the crystalline defect structures by doping effects.

Keywords
Li-incorporation
ZnO thin film
spray pyrolysis deposition
spiral growth
anti-surfactant
deep level emission
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Information
  • Publisher :Materials Research Society of Korea
  • Publisher(Ko) :한국재료학회
  • Journal Title :Korean Journal of Materials Research
  • Journal Title(Ko) :한국재료학회지
  • Volume : 28
  • No :2
  • Pages :101-107
  • Received Date : 2017-12-19
  • Revised Date : 2017-12-23
  • Accepted Date : 2017-12-26
  • DOI :https://doi.org/10.3740/MRSK.2018.28.2.101
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