@article{ART002327516},
author={ Seung-Keun Oh and Sang Do Kang and 김영만 and 박순섭 },
title={Effect of residual oxygen in a vacuum chamber on the deposition of cubic boron nitride thin film},
journal={Journal of Ceramic Processing Research},
issn={1229-9162},
year={2016},
volume={17},
number={7},
pages={763-767},
doi={10.36410/jcpr.2016.17.7.763},
url={http://dx.doi.org/10.36410/jcpr.2016.17.7.763}

TY - JOUR
AU - Seung-Keun Oh
AU - Sang Do Kang
AU - 김영만
AU - 박순섭
TI - Effect of residual oxygen in a vacuum chamber on the deposition of cubic boron nitride thin film
T2 - Journal of Ceramic Processing Research
PY - 2016
VL - 17
IS - 7
PB - 한양대학교 청정에너지연구소
SP - 763-767
SN - 1229-9162
AB - The structural characterization of cubic boron nitride (c-BN) thin films was performed using a B4C target in a radio-frequencymagnetron sputtering system. The deposition processing conditions, including the substrate bias voltage, substratetemperature, and base pressure were varied. Fourier-transform infrared spectroscopy and X-ray photoelectron spectroscopywere used to analyze the crystal structures and chemical binding energy of the films. For the BN film deposited at roomtemperature, c-BN was formed in the substrate bias voltage range of −400 V to −600 V. Less c-BN fraction was observed asthe deposition temperature increased, and more c-BN fraction was observed as the base pressure increased.
KW - c-BN, B4C, Oxygen addition, Base pressure, Magnetron sputtering
DO - 10.36410/jcpr.2016.17.7.763
UR - http://dx.doi.org/10.36410/jcpr.2016.17.7.763
ER -

Seung-Keun Oh , Sang Do Kang , 김영만 and 박순섭 . 2016, “Effect of residual oxygen in a vacuum chamber on the deposition of cubic boron nitride thin film”, Journal of Ceramic Processing Research, vol. 17, no. 7, pp. 763-767. Available from: doi:10.36410/jcpr.2016.17.7.763

Seung-Keun Oh Sang Do Kang et al. 김영만 박순섭 “Effect of residual oxygen in a vacuum chamber on the deposition of cubic boron nitride thin film” Journal of Ceramic Processing Research 17.7 pp. 763-767 (2016): 763.

Seung-Keun Oh , Sang Do Kang , 김영만 , 박순섭 . Effect of residual oxygen in a vacuum chamber on the deposition of cubic boron nitride thin film Journal of Ceramic Processing Research [Internet]. 2016; 17( 7), : 763-767. Available from: doi:10.36410/jcpr.2016.17.7.763

Seung-Keun Oh , Sang Do Kang , 김영만 and 박순섭 . “Effect of residual oxygen in a vacuum chamber on the deposition of cubic boron nitride thin film” Journal of Ceramic Processing Research 17, no.7 (2016): 763-767. doi: 10.36410/jcpr.2016.17.7.763