Abstract
Fabrication of flexible micro-light-emitting diodes (Micro-LEDs) is becoming an important technology for flexible displays, which plays a significant role in the field of visual communication in the upcoming internet of things era and metaverse. Here, we explore high-quality laser lift-off methods for gallium nitride (GaN)-based Micro-LED arrays using laser lift-off (LLO) technology to separate Micro-LED arrays from sapphire substrates via a KrF excimer laser system (λ = 248 nm). Ultimately, we used viscoelastic stamp transfer technology to successfully transfer Micro-LED arrays to various types of substrates, including tape and copper foil (Cu), thus enabling applications in different scenarios. The results show that the threshold voltage and EL intensity of Micro-LEDs on the tape and Cu substrates increase slightly, and the peak of the electroluminescence (EL) spectrum was basically stable at 458nm. Furthermore, Micro-LEDs on polyethylene terephthalate (PET) can still work normally when the bending radius of PET is 4 cm.
Export citation and abstract BibTeX RIS
During the embargo period (the 12 month period from the publication of the Version of Record of this article), the Accepted Manuscript is fully protected by copyright and cannot be reused or reposted elsewhere.
As the Version of Record of this article is going to be / has been published on a subscription basis, this Accepted Manuscript will be available for reuse under a CC BY-NC-ND 3.0 licence after the 12 month embargo period.
After the embargo period, everyone is permitted to use copy and redistribute this article for non-commercial purposes only, provided that they adhere to all the terms of the licence https://creativecommons.org/licences/by-nc-nd/3.0
Although reasonable endeavours have been taken to obtain all necessary permissions from third parties to include their copyrighted content within this article, their full citation and copyright line may not be present in this Accepted Manuscript version. Before using any content from this article, please refer to the Version of Record on IOPscience once published for full citation and copyright details, as permissions may be required. All third party content is fully copyright protected, unless specifically stated otherwise in the figure caption in the Version of Record.