Recently, the composite films of ceramics and metals are useful for electric devices. In this study, Y₂O₃ single layer films and Fe / Y₂O₃ layered films were fabricated by aerosol deposition (AD) method. The saturation magnetic polarizations J_s of Fe / Y₂O₃ AD films were 0.7 ∼ 1.1 T. The real part of relative permeability μ_r' increased from 4.5 to 5.6 and the resonant frequency f_r decreased from 700 to 320 MHz after the heat treatment at 973 K for 1h. These changes were considered to be due to the decreases of coercivity H_cj from 8.7 kA·m^-1 to 7.5 kA·m^-1.