Journal of the Vacuum Society of Japan
Online ISSN : 1882-4749
Print ISSN : 1882-2398
ISSN-L : 1882-2398
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ショットキーバリア高さ制御のための元素添加によるアルミナ-金属界面結合変化の定量的予測式
吉武 道子柳生 進二郎知京 豊裕
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ジャーナル フリー

2012 年 55 巻 5 号 p. 233-236

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  An elemental species that bonds oxide and metal at the interface is crucial to the electric properties of the electronic devices. We have developed a numerical formula for predicting a stable interface bonding species at a metal/alumina interface in our previous study. In this study, we extend this numerical formula for predicting interface bonding between alumina and aluminum-containing metals. The effectiveness of the extended formula was examined by experimental results in references. It was revealed that the prediction by the formula agreed with the results reported in the references. According to the formula, O-terminated interface between pure metal (M) and alumina can be switched to Al-termination by alloying the pure metal with Al metal. The formula uses only basic quantities of pure elements and the formation enthalpy of oxides. Therefore it can be applied for most of metals in the periodic table and is useful for material screening in interface modification.

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© 2012 一般社団法人日本真空学会
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