Journal of the Vacuum Society of Japan
Online ISSN : 1882-4749
Print ISSN : 1882-2398
ISSN-L : 1882-2398
解説
電子線トモグラフィー法による結晶性材料の解析
金子 賢治
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ジャーナル フリー

2011 年 54 巻 4 号 p. 253-255

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  Combination of transmission electron microscopy and computed tomography (TEM-CT) is a powerful technique to characterize three-dimensional nature of materials. In this paper, its principle and application are described in detail. In addition, as an example, TEM and TEM-CT was applied on TiN-Ag nanocomposite synthesized by dc arc-plasma method. Microstructures of TiN-Ag nanocomposite were carefully characterized by TEM, and nano-morphologies by TEM-CT. It was found that the surface of nanocrystalline TiN matrix was covered by finely dispersed Ag nanoparticles, and it was found that they were physically attached but not chemically bonded. From these experimental results, formation mechanisms are also predicted.

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© 2011 一般社団法人日本真空学会
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