2007 年 50 巻 9 号 p. 583-585
We introduce a miniature electron/ion/soft-X-ray detector mounted on a conflat flange with an outer diameter of 70 mm. It consists of an extraction/retarding electrode, microchannel plates, and a conflat flange with an outer diameter of 70 mm. This detector can be used for measurements of electrons, ions, or soft-X-rays generated in the gas phase and those emitted from surfaces.