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Experimental Study on Fabricating Micro-Hole Arrays on CVD Diamond Film Using a Nanosecond Pulsed Laser

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Abstract

The increasing demand for micro-parts and miniaturization of devices has led to development of manufacturing micro-holes on different materials. In this study, micro-hole arrays were drilled on a CVD diamond film using a nanosecond pulsed laser. The effect of laser processing parameters, such as pulse width, scanning speed, and scanning times on the shape, size, and morphology of micro-holes was investigated. The entrance, exit, and cross-sectional dimensions and morphology of the micro-holes were examined. The results demonstrated that micro-hole arrays with an entrance diameter of 49.1–56.3 μm, exit diameter of 4.6–10.6 μm, and taper angle of less than 18.5° can be obtained using a nanosecond pulsed laser. It was found that pulse width has little effect on entrance diameter, however, with the increase of pulse width, the micro-hole exit diameter and depth increased, while the taper angle decreased. With the increase of laser scanning speed, the micro-hole entrance diameter decreased slightly, and there is little variation in micro-hole exit diameter and taper angle. The scanning times were found to have little effect on micro-hole entrance diameter. However, with the increase of scanning times, the micro-hole exit diameter increased and the taper angle decreased.

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Funding

The authors acknowledge the financial support of the National Natural Science Foundation of China (NSFC) with Grant nos. 51775118 and 51275096.

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Authors and Affiliations

  1. School of Mechanical and Electronic Engineering, Guangdong University of Technology, 510006, Guangzhou, China

    Yanling Liao, Fenglin Zhang, Peng Wang & Xiaozhu Xie

  2. School of Mechanical and Electronic Engineering, Zhongkai University of Agriculture and Engineering, 510225, Guangzhou, China

    Yumei Zhou

  3. Guangxi Key Laboratory of Superhard Materials, 541004, Guilin, China

    Delong Xie

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  1. Yanling Liao
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  2. Fenglin Zhang
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  4. Xiaozhu Xie
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Correspondence to Fenglin Zhang.

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Yanling Liao, Zhang, F., Wang, P. et al. Experimental Study on Fabricating Micro-Hole Arrays on CVD Diamond Film Using a Nanosecond Pulsed Laser. J. Superhard Mater. 43, 248–260 (2021). https://doi.org/10.3103/S1063457621040067

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  • DOI: https://doi.org/10.3103/S1063457621040067

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