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Qualitative sims analysis of28,29,30Si isotope concentration in silicon using a Tof.Sims-5 Setup

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Bulletin of the Russian Academy of Sciences: Physics Aims and scope

Abstract

The possibility of quantitative SIMS determination of28-30Si isotope concentrations in silicon samples using a TOF.SIMS-5 spectrometer is shown. Th e isotope composition of a large number of Si samples, namely epitaxial Si layers with a natural isotope ratio, amorphous Si films depleted of28Si isotope (deposited on natural Si substrates), and samples enriched with 28Si isotope (manufactured by VITCON) is investigated. Substantial variations in the 29Si/30Si isotope ratio (from 1.51 for the natural content up to 25 in the case of limiting enrichment with 28Si isotope) are revealed.

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Authors and Affiliations

  1. Institute of Microstructure Physics, Russian Academy of Sciences, Nizhni Novgorod, 603950, Russia

    M. N. Drozdov, Yu. N. Drozdov, D. A. Pryakhin & V. I. Shashkin

  2. Institute of High-Purity Substance Chemistry, Russian Academy of Sciences, Nizhni Novgorod, 603950, Russia

    P. G. Sennikov

  3. VITCON Projectconsult GmbH, D-07743, Jena, Germany

    H.-J. Pohl

Authors
  1. M. N. Drozdov
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  2. Yu. N. Drozdov
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  3. D. A. Pryakhin
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  4. V. I. Shashkin
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  5. P. G. Sennikov
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  6. H.-J. Pohl
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Corresponding author

Correspondence to M. N. Drozdov.

Additional information

Original Russian Text © M.N. Drozdov, Yu.N. Drozdov, D.A. Pryakhin, V.I. Shashkin, P.G. Sennikov, H.-J. Pohl, 2010, published in Izvestiya Rossiiskoi Akademii Nauk. Seriya Fizicheskaya, 2010, Vol. 74, No. 1, pp. 84-86.

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Drozdov, M.N., Drozdov, Y.N., Pryakhin, D.A. et al. Qualitative sims analysis of28,29,30Si isotope concentration in silicon using a Tof.Sims-5 Setup. Bull. Russ. Acad. Sci. Phys. 74, 75–77 (2010). https://doi.org/10.3103/S106287381001020X

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  • DOI: https://doi.org/10.3103/S106287381001020X

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