2001 Volume 42 Issue 10 Pages 2131-2132
We have examined fine structure of surface blisters formed by D+ or He+ irradiation onto mono-crystalline silicon by grazing incidence electron microscopy (GIEM), using an energy-filtering transmission electron microscope (EFTEM). Mapping of the projected thickness clearly visualized the structural difference of the blister skins formed by D+ and He+ irradiation respectively. A He distribution image of the He-blister was also successfully obtained.