Impacts of nanometer sized ceramic particles to the substrate with different incident angles were simulated by molecular dynamics to investigate the mechanism of aerosol deposition method. Comparing with the normal incident case, obliquely incident particles to the substrate show different characteristics of fragmentation including particle rolling on the substrate and a tail structure of depositing atoms. Structural modification and its incident angle dependence were also observed in the substrate. Elevations of temperatures in nanoparticle and substrate show different dependencies on the incident angle.