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https://doi.org/10.18429/JACoW-IPAC2014-MOPRI008
Title A Compact 2.45 GHz Microwave IOn Source Based High Fluence Irradiation Facility at IUAC, Delhi
Authors
  • N. Kumar, R. Ahuja, R.N. Dutt, D. Kanjilal, P.S. Lakshmy, Y. Mathur, G.O. Rodrigues
    IUAC, New Delhi, India
Abstract A compact 2.45 GHz microwave ion source based low energy ion been facility has been developed for performing various experiments in material science and for studies related to plasma physics. The design of the compact microwave source is based on a tunable permanent magnet configuration and is powered by a 2 kW magnetron [1,2]. The double walled, water cooled stainless steel plasma chamber and ridge waveguide have been fabricated using the latest ‘LaserCUSING’ technique. The electron energy distribution functions have been measured in a similar low frequency ion source and validated by model calculations [1]. Extraction of the beam can also be performed at very low voltages in the order of hundreds of volts with high intensities by nullifying the space charge effects with the secondary electrons. The facility will be used for ion implantation, phase formation, surface etching and pattering experiments. The design aspects of the microwave ion source and low energy beam transport system will be presented.
Footnotes & References * “Studies on the effect of the axial magnetic field on the x-ray bremsstrahlung in a 2.45 GHz permanent magnet microwave ion source” Narender Kumar et. al. accepted for publication in RSI.
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Conference IPAC2014, Dresden, Germany
Series International Particle Accelerator Conference (5th)
Proceedings Link to full IPAC2014 Proccedings
Session Poster Session, Ribery Area
Date 16-Jun-14   16:00–18:00
Main Classification 03 Particle Sources and Alternative Acceleration Techniques
Sub Classification T01 Proton and Ion Sources
Keywords ion, plasma, ion-source, extraction, coupling
Publisher JACoW Publishing, Geneva, Switzerland
Editors Christine Petit-Jean-Genaz (CERN, Geneva, Switzerland); Gianluigi Arduini (CERN, Geneva, Switzerland); Peter Michel (HZDR, Dresden, Germany); Volker RW Schaa (GSI, Darmstadt, Germany)
ISBN 978-3-95450-132-8
Published July 2014
Copyright
Copyright © 2014 by JACoW, Geneva, Switzerland     CC-BY Creative Commons License
cc Creative Commons Attribution 3.0