IEICE Transactions on Electronics
Online ISSN : 1745-1353
Print ISSN : 0916-8524
Special Section on Fundamentals and Applications of Advanced Semiconductor Devices
Present Status and Prospect of Graphene Interconnect Applications
Kazuyoshi UENO
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2022 Volume E105.C Issue 10 Pages 572-577

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Abstract

Graphene has been expected as an alternative material for copper interconnects in which resistance increases and reliability deteriorates in nanoscale. While the principle advantages are verified by simulations and experiments, they have not been put into practical use due to the immaturity of the manufacturing process leading to mass production. On the other hand, recent steady progress in the fabrication process has increased the possibility of practical application. In this paper, I will review the recent advances and the latest prospects for conductor applications of graphene centered on interconnects. The possibility of further application utilizing the unique characteristics of graphene is discussed.

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© 2022 The Institute of Electronics, Information and Communication Engineers
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