プラズマ・核融合学会誌
Print ISSN : 0918-7928
小特集 「ミクロ反応場の生成と応用 -マイクロプラズマ研究の現状と将来展望-」
ミクロ反応場の生成と応用 -マイクロプラズマ研究の現状と将来展望- 2.マイクロプラズマの生成
石井 彰三秋山 秀典八田 章光
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2004 年 80 巻 10 号 p. 827-834

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We review methods of generating microplasamas and the issues involved in generating them efficiently such as developing miniature discharge circuits and active-functional electrodes. Because the size of plasmas is extremely small, new experimental schemes not common in conventional plasma apparatuses will be applicable. The microplasma discharges are established with solid, liquid, and gaseous matter. The pulsed power system is one of the effective ways to power the discharges, given that the electrical energy has to fill small volumes over relatively short time in order to avoid energy and particle losses. Nano-sized-structure and active-functional electrodes are developed to establish control of electrons, which is essential to obtain uniform and stable discharges.

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© 2004 by The Japan Society of Plasma Science and Nuclear Fusion Research (Japanese)
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