Skip to main content
Log in

Cross-Sectional Scanning Tunneling Microscopy of Semiconductor Heterostructures

  • Nanoscale Characterization of Materials
  • Published:
MRS Bulletin Aims and scope Submit manuscript

This is a preview of subscription content, log in via an institution to check access.

Access this article

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

References

  1. P. Murait and D.W. Pohl, Appl. Phys. Lett. 48 (1986) p. 514.

    Google Scholar 

  2. H.W.M. Salemink, H.P. Meier, R. Ellialtioglu, J.W. Gerritsen, and P.R.M. Muralt, ibid. 54 (1989) p. 1112.

    Google Scholar 

  3. A.R. Smith, S. Gwo, K. Sadra, Y.C. Shih, B.G. Streetman, and C.K. Shih, J. Vac. Sci. Technol. B 12 (1994) p. 2610.

    Google Scholar 

  4. J.F. Zheng, J.D. Walker, M.B. Salmeron, and E.R. Weber, Phys. Rev. Lett. 72 (1994) p. 2414.

    Google Scholar 

  5. R.M. Feenstra, D.A. Collins, D.Z-Y. Ting, M.W. Wang, and T.C. McGill, ibid. p. 2749.

    Google Scholar 

  6. A.Y. Lew, E.T. Yu, D.H. Chow, and R.H. Miles, Appl. Phys. Lett. 65 (1994) p. 201.

    Google Scholar 

  7. S.L. Skala, W. Wu, J.R. Tucker, J.W. Lyding, A. Seabaugh, E.A. Beam III, and D. Jovanovic, J. Vac. Sci. Technol. B 13 (1995) p. 660.

    Google Scholar 

  8. S. Kordic, E.J. Van Loenen, D. Dijkkamp, A.J. Hoeven, and H.K. Moraal, ibid. A 8 (1990) p. 549.

    Google Scholar 

  9. E.T. Yu, K. Barmak, P. Ronsheim, M.B. Johnson, P. McFarland, and J-M. Halbout, J. Appl. Phys. 79 (1996) p. 2115.

    Google Scholar 

  10. R.M. Feenstra, J.A. Stroscio, J. Tersoff, and A.P. Fein, Phys. Rev. Lett. 58 (1987) p. 1192.

    Google Scholar 

  11. M.A. Lutz, R.M. Feenstra, and J.O. Chu, Surf. Sci. 328 (1995) p. 215.

    Google Scholar 

  12. E.J. Van Loenen, D. Dijkkamp, and A.J. Hoeven, J. Micros. 152 (1988) p. 487.

    Google Scholar 

  13. D. Dijkkamp, E.J. Van Loenen, A.J. Hoeven, and J. Dieleman, J. Vac. Sci. Technol. A 8 (1990) p. 218.

    Google Scholar 

  14. G. Tuttle, H. Kroemer, and J.H. English, J. Appl. Phys. 67 (1990) p. 3032.

    Google Scholar 

  15. B. Brar, J. Ibbetson, H. Kroemer, and J.H. English, Appl. Phys. Lett. 64 (1994) p. 3392.

    Google Scholar 

  16. D.H. Chow, R.H. Miles, and A.T. Hunter, J. Vac. Sci. Technol. B 10 (1992) p. 888.

    Google Scholar 

  17. A.Y. Lew, E.T. Yu, and Y-H. Zhang, ibid. 14 (1996) p. 2940.

    Google Scholar 

  18. Y-H. Zhang and D.H. Chow, Appl. Phys. Lett. 65 (1994) p. 3239.

    Google Scholar 

  19. A.Y. Lew, S.L. Zuo, E.T. Yu, and R.H. Miles, ibid. 70 (1997) p. 75.

    Google Scholar 

  20. S.M. Goodnick, D.K. Ferry, C.W. Wilmsen, Z. Liliental, D. Fathy, and O. Krivanek, Phys. Rev. B 32 (1985) p. 8171.

    Google Scholar 

  21. M.D. Pashley, K.W. Haberern, and J.M. Gaines, Appl. Phys. Lett. 58 (1991) p. 406.

    Google Scholar 

  22. J. Sudijono, M.D. Johnson, C.W. Snyder, M.B. Elowitz, and B.G. Orr, Phys. Rev. Lett. 69 (1992) p. 2811.

    Google Scholar 

  23. E.J. Heller and M.G. Lagally, Appl. Phys. Lett. 60 (1992) p. 2675.

    Google Scholar 

  24. K. Pond, R. Maboudian, V. Bressler-Hill, D. Leonard, X-S. Wang, K. Self, W.H. Weinberg, and P.M. Petroff, J. Vac. Sci. Technol. B 11 (1993) p. 1374.

    Google Scholar 

  25. R.H. Miles, J.N. Schulman, D.H. Chow, and T.C. McGill, Semicond. Sci. Technol. 8 (1993) p. S102.

  26. M.W. Wang, D.A. Collins, T.C. McGill, and R.W. Grant, J. Vac. Sci. Technol. B 11 (1993) p. 1418.

    Google Scholar 

  27. D.A. Collins, M.W. Wang, R.W. Grant, and T.C. McGill, J. Appl. Phys. 75 (1994) p. 259.

    Google Scholar 

  28. R.H. Miles, D.H. Chow, and W.J. Hamilton, ibid. 71 (1992) p. 211.

    Google Scholar 

Download references

Authors

Rights and permissions

Reprints and permissions

About this article

Cite this article

Yu, E.T. Cross-Sectional Scanning Tunneling Microscopy of Semiconductor Heterostructures. MRS Bulletin 22, 22–26 (1997). https://doi.org/10.1557/S0883769400033765

Download citation

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1557/S0883769400033765

Navigation