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Dynamical X-Ray Diffraction Studies of Interfacial Strain in Superlattices Grown by Molecular Beam Epitaxy

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Abstract

Dynamical X-ray diffraction studies have been carried out for lattice-matched InGaAs/InP superlattices grown by modified molecular beam epitaxy (MBE) techniques. The (400) X-ray satellite pattern, which is predominantly affected by the strain modulation, was analyzed. The strain and thickness of the actual layers including the presence of strained interfacial regions were determined.

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Authors and Affiliations

  1. AT&T Bell Laboratories, Murray Hill, New Jersey, 07974, USA

    J. M. Vandenberg, S. N. G. Chu, R. A. Hamm, M. B. Panish, D. Ritter & A. T. Mancrander

  2. Argonne National Laboratory, Argonne, IL, 60439, USA

    A. T. Mancrander

Authors
  1. J. M. Vandenberg
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  2. S. N. G. Chu
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  3. R. A. Hamm
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  4. M. B. Panish
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  5. D. Ritter
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  6. A. T. Mancrander
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Vandenberg, J.M., Chu, S.N.G., Hamm, R.A. et al. Dynamical X-Ray Diffraction Studies of Interfacial Strain in Superlattices Grown by Molecular Beam Epitaxy. MRS Online Proceedings Library 240, 141–145 (1991). https://doi.org/10.1557/PROC-240-141

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  • DOI: https://doi.org/10.1557/PROC-240-141

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