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Thin Film Growth

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Abstract

A review of the experimental and theoretical results describing thin film growth modes is presented. Thermodynamic criteria for determining which growth mode might be expected to occur in a particular case along with some kinetic considerations are given. The characteristics of each of the three principal growth modes, namely Frank and van der Merwe (layer), Stranski-Krastanov (layer plus island), and Volmer-Weber (island), are discussed. Lastly, the requirements favoring the growth of epitaxial multilayers are briefly considered.

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Acknowledgments

This work was supported by the U.S. Department of Energy on grant number DE-FG02-84ER45139.

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Vook, R.W. Thin Film Growth. MRS Online Proceedings Library 103, 3–11 (1987). https://doi.org/10.1557/PROC-103-3

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