Abstract
We present a method to realize nanoelectromechanical systems (NEMS) resonator structures from carbon nanotubes (CNT)/metal layered composite structures. The method utilizes a self aligning process over a near 2-D CNT network on GaAs to realize resonator structures and a highly selective etchant, a standard citric acid/hydrogen peroxide solution, to achieve release of NEMS resonators from the substrate. We find this method along with critical point drying (CPD) to yield robust hybrid CNT/metal resonator structures with fundamental resonant frequencies in the 10 MHz range. With high reflectivity, conductivity, and bio-compatibility of metals, this fabrication method along with possible benefits of CNT have many application possibilities.
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Seung, S.H., Jung, H.B., Byung, Y.L. et al. Fabrication of CNT/metal torsional resonator structures on GaAs. MRS Online Proceedings Library 1018, 812 (2007). https://doi.org/10.1557/PROC-1018-EE08-12
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DOI: https://doi.org/10.1557/PROC-1018-EE08-12