Abstract
Substrate surface roughness effects on Ag film texture were investigated using pole figure analysis. X-ray diffraction results confirmed that Ag thin films on smooth SiO2 substrates had strong {111} texture when compared with Ag films on PEN. It was noted that the difference of strain energy density (δE ε) in Ag film on PEN (0.039 MPa) was almost 5 times greater than that on SiO2 (0.0084 MPa). The comparison between surface and strain energies revealed that the {111} texture of Ag thin film on SiO2 was explained by minimization of the surface energy and the weaker {111} texture of Ag on PEN was a result of reduced diffusion length of Ag adatoms on the rough PEN surface.
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Zoo, Y., Alford, T.L. Texture Evolution and Stress in Silver Thin Films on Different Substrates Using X-ray Diffraction. MRS Online Proceedings Library 990, 807 (2006). https://doi.org/10.1557/PROC-0990-B08-07
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DOI: https://doi.org/10.1557/PROC-0990-B08-07