Skip to main content
Log in

In situ coupling of atomic force microscopy and sub-micrometer focused X-ray techniques

  • Published:
MRS Online Proceedings Library Aims and scope

Abstract

A scanning force microscope for in situ nanofocused X-ray studies (SFINX) has been developed which can be installed on diffractometers at synchrotron beamlines allowing for the combination with various techniques such as coherent X-ray diffraction and fluorescence. The capabilities of this device are demonstrated on Cu nanowires and on Au islands grown on sapphire (0001). The sample topography, crystallinity, and elemental distribution of the same area are investigated by recording simultaneously an AFM image, a scanning X-ray diffraction map, and a fluorescence map. Additionally, the mechanical response of Au islands is studied by in situ indentation tests employing the AFM-tip and recording 2D X-ray diffraction patterns during mechanical loading.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Similar content being viewed by others

References

  1. M.D. Uchic, D.M. Dimiduk, J.N. Florando, W.D. Nix, Science 305, 986 (2004).

    Article  CAS  Google Scholar 

  2. H. Bei, S. Shim, E. George, M. Miller, E. Herbert, G. Pharr, Scripta Mater. 57, 397 (2007).

    Article  CAS  Google Scholar 

  3. G. Richter {etet al.}, Nano Letters 9, 3048 (2009).

    Article  CAS  Google Scholar 

  4. D. Kiener, W. Grosinger, G. Dehm, R. Pippan, Acta Materialia 56, 580 (2008).

    Article  CAS  Google Scholar 

  5. L.Y. Chen, G. Richter, J.P. Sullivan, D.S. Gianola, Phys. Rev. Lett. 109, (2012).

  6. A.M. Minor, J.W. Morris, E.A. Stach, Appl. Phys. Lett. 79, 1625 (2001).

    Article  CAS  Google Scholar 

  7. R. Maaß, S. van Petegem, C. Borca, H. van Swygenhoven, Mat. Sci. Eng. A 524, 40 (2009)

    Article  Google Scholar 

  8. C. Kirchlechner {etet al.}, Acta Mater. 60, 1252 (2012).

    Article  CAS  Google Scholar 

  9. T. Scheler {etet al.}, Appl. Phys. Lett. 94, 023109 (2009).

    Article  Google Scholar 

  10. M.S. Rodrigues {etet al.}, J. Instrum. 3, 12004 (2008).

    Article  Google Scholar 

  11. M.S. Rodrigues {etet al.}, J. Appl. Phys. 106, 103525 (2009).

    Article  Google Scholar 

  12. G. Beutier {etet al.}, J. Phys. Conf. Ser. 425, 132003 (2013).

  13. H. Sadan, W. Kaplan, J. Mater. Sci. 41, 5099 (2006).

    Article  CAS  Google Scholar 

  14. M.E. Toimil Molares, {etet al.}, Adv. Mater. 13, 62 (2001).

    Article  Google Scholar 

  15. T. Akiyama, U. Staufer, N.F. de Rooij, P. Frederix, A. Engel, Rev. Sci. Instr. 74, 112 (2003).

    Article  CAS  Google Scholar 

  16. Z. Ren {etet al.}, submitted to J. Synchrotron Radiat. (under review).

  17. F. Mastropietro {etet al.}, Optics Express 19, 19223 (2011).

    Article  CAS  Google Scholar 

  18. J.D. Eshelby, J. Appl. Phys. 24, 176 (1953).

    Article  Google Scholar 

  19. D. Mordehai, M. Kazakevich, D.J. Srolovitz, E. Rabkin, Acta Materialia 59, 2309 (2011).

    Article  CAS  Google Scholar 

Download references

Acknowledgments

The authors gratefully acknowledge the financial support from the French National Research Agency through the project ANR-11-BS10-01401 MecaniX and the European Synchrotron Radiation Facility (ESRF) for the allocated experiment at the ID01 beamline. Furthermore, the authors acknowledge M. Cassinelli and M.E. Toimil-Molares from the GSI Helmholtz Centre for Heavy Ion Research in Darmstadt (Germany) for providing Cu nanowires.

Author information

Authors and Affiliations

Authors

Rights and permissions

Reprints and permissions

About this article

Check for updates. Verify currency and authenticity via CrossMark

Cite this article

Cornelius, T.W., Ren, Z., Mastropietro, F. et al. In situ coupling of atomic force microscopy and sub-micrometer focused X-ray techniques. MRS Online Proceedings Library 1712, 63–68 (2014). https://doi.org/10.1557/opl.2014.909

Download citation

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1557/opl.2014.909

Navigation