Skip to main content
SpringerLink
Log in

Properties of Sputter Deposited ZnO Films Co-doped with Lithium and Phosphorus

  • Articles
  • Published:
MRS Online Proceedings Library Aims and scope

Abstract

Thin films of ZnO co-doped with lithium and phosphorus were deposited on sapphire substrates by RF magnetron sputtering. The films were sequentially deposited from ultra pure ZnO and Li3PO4 solid targets. Post deposition annealing was carried using a rapid thermal processor in O2 and N2 at temperatures ranging from 500 °C to 1000 °C for 3 min. Analyses performed using low temperature photoluminescence spectroscopy measurements reveal luminescence peaks at 3.359, 3.306, 3.245 eV for the co-doped samples. The x-ray diffraction 2θ-scans for all the films showed a single peak at about 34.4° with full width at half maximum of about 0.17°. Hall Effect measurements revealed conductivities that change from p-type to n-type over time.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Similar content being viewed by others

References

  1. M. R. Wagner, U. Haboeck, P. Zimmer, A. Hoffmann, S. Lautenschläger, C. Neumann, J. Sann and B. K. Meyer, Proc. of SPIE 6474, 64740X–1 (2007).

  2. Ü. Özgür, Ya. I. Alivov, C. Liu, A. Teke, M. A. Reshchikov, S. Doğan, V. Avrutin, S.-J. Cho and H. Morkoç, J. Appl. Phys. 98, 041301 (2005).

    Article  Google Scholar 

  3. V. Avrutin, D. J. Silversmith, and H. Morkoç, Proc IEEE Inst. Electr. Electron. Eng. 98(7), 1269–1280 (2010).

    Article  CAS  Google Scholar 

  4. C. H. Park, S. B. Zhang, and Su-Huai Wei, Phys. Rev. B 66, 073202 (2002).

    Article  Google Scholar 

  5. L. S. Vlasenko and G. D. Watkins, Phys. Rev. B 72, 035203 (2005).

    Article  Google Scholar 

  6. A. Janotti and C. G. Van deWalle, Phys. Rev. B 75, 165202 (2007).

    Article  Google Scholar 

  7. X. Y. Duan, R. H. Yao and Y. J. Zhao . Appl. Phys. A 91, 467–472 (2008)

    Article  CAS  Google Scholar 

  8. C.H. Park, S.B. Zhang and S.H. Wei, Phys. Rev. B 66, 073 202 (2002).

    Google Scholar 

  9. D. C. Look, R. L. Jones, J. R. Sizelove, N. Y. Garces, N. C. Giles, and L. E. Halliburton, Phys. Stat. Sol. a 195, 171 (2003).

    Article  CAS  Google Scholar 

  10. X. M. Fan, J. S. Lian and Z. X. Guo, Appl. Surf. Sci. 239, 176 (2005).

    Article  CAS  Google Scholar 

  11. S. T. Tan, B. J. Chen, X. W. Sun, W. J. Fan, H. S. Kwok, X. H. Zhang and S. J. Chua, J. Appl. Phys. 98, 013505 (2005).

    Article  Google Scholar 

  12. S. J. Kang, H.-H. Shin and Y.-S. Yoon, Journal of the Korean Physical Society 51(1), 183–188 (2007).

    Article  CAS  Google Scholar 

  13. M. D. McCluskey and S. J. Jokela J. Appl. Phys. 106, 071101(2009).

    Article  Google Scholar 

  14. T. Yamamoto . Phys. Stat. Sol.(a) 193(3), 423–433 (2002).

    Article  CAS  Google Scholar 

  15. J. G. Lu, Y.Z. Zhang, Z.Z. Ye, L.P. Zhu, L. Wang, B.H. Zhao and Q.L. Liang, Appl. Phys. Lett. 88, 222 114 (2006).

    Article  Google Scholar 

  16. D. Yu, L. Hu, S. Qian, H. Zhang, S. A. Len, L. K. Len, Q. Fu, X. Chen and K. Sun, J. Phys. D: Appl. Phys. 42, 055110 (2009).

    Article  Google Scholar 

Download references

Author information

Authors and Affiliations

  1. Department of Physics and Astronomy, Youngstown State University, 44555, Youngstown, OH, USA

    T. N. Oder, A. Smith, M. Freeman & M. McMaster

  2. Department of Physics, Brooklyn College of the CUNY, 11210, Brooklyn, NY, USA

    B. Cai & M. L. Nakarmi

Authors
  1. T. N. Oder
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. A. Smith
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. M. Freeman
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. M. McMaster
    View author publications

    You can also search for this author in PubMed Google Scholar

  5. B. Cai
    View author publications

    You can also search for this author in PubMed Google Scholar

  6. M. L. Nakarmi
    View author publications

    You can also search for this author in PubMed Google Scholar

Rights and permissions

Reprints and permissions

About this article

Cite this article

Oder, T.N., Smith, A., Freeman, M. et al. Properties of Sputter Deposited ZnO Films Co-doped with Lithium and Phosphorus. MRS Online Proceedings Library 1494, 77–82 (2012). https://doi.org/10.1557/opl.2013.4

Download citation

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1557/opl.2013.4

Search

Navigation