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The deposition of α–Fe2O3 by aerosol chemical vapor deposition

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Abstract

α-Fe2O3 thin films have been deposited on Si(111) substrates at high temperatures (600–800 °C) by the spray pyrolysis method. Four different iron(III) β-diketonates have been used as precursors in order to obtain polycrystalline films of good adherence, which have been characterized by x-ray diffraction, scanning electron microscopy, and magnetic measurements.

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Authors and Affiliations

  1. Departamento de Química Inorgánica y Bioinorgánica, Facultad de Farmacia, Universidad Complutense, 28040, Madrid, Spain

    A. Martínez, J. Peña & M. Vallet-Regí

  2. Instituto de Magnetismo Aplicadu “Salvador Velayos”, Apdo. Correos 155, Las Rozas, 28230, Madrid, Spain

    J. Peña, J. M. González-Calbet & M. Vallet-Regí

  3. Laboratoire des Matériaux et du Génie Physique, URA 1109, CNRS, INPG, BP 46, 38402, Saint Martin D’Heres, France

    M. Labeau

  4. Departamento de Química Inorgánica, Facultad de Químicas, Universidad Complutense, 28040, Madrid, Spain

    J. M. González-Calbet

Authors
  1. A. Martínez
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  2. J. Peña
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  3. M. Labeau
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  4. J. M. González-Calbet
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  5. M. Vallet-Regí
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Martínez, A., Peña, J., Labeau, M. et al. The deposition of α–Fe2O3 by aerosol chemical vapor deposition. Journal of Materials Research 10, 1307–1311 (1995). https://doi.org/10.1557/JMR.1995.1307

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  • DOI: https://doi.org/10.1557/JMR.1995.1307

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