Skip to main content
SpringerLink
Log in

Reactive coevaporation of YBaCuO superconducting films

  • Articles
  • Published:
Journal of Materials Research Aims and scope Submit manuscript

Abstract

Growth conditions for YBaCuO thin films are investigated. Films have been made by reactive e-beam coevaporation using three metal sources. In the best cases, as-made films are superconducting with Tc’s (R = 0) up to 90 K and Jc’s (at 4.2 K) above 107 A/cm2. Oxygen pressure, deposition temperature, as well as compositional dependencies of the films are presented. It is found that in conditions of lower oxygen, pressure films with average composition off the 1–2–3 stoichiometry have higher Tc’s. For pressure <10 mTorr, the highest Tc obtained is for Ba/Y deposition ratio ⋚1.4. The morphology and impurity phases of these films are examined. The Ba-deficient films have oriented CuYO2 and CuO as the dominant impurity phases. C-axis lattice parameters (c0) are also examined. It is found that for a given Tc, films made at lower pressure have c0’s which are expanded compared to the films made at higher pressures (>100 mTorr). The expanded c0’s for these films cannot be reduced by a low temperature oxygen anneal. We suggest that metal-atom point-like defects are quenched into these films and we discuss a particular Ba-for-Y substitution model.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Similar content being viewed by others

References

  1. P. Chaudhari, R. H. Koch, R. B. Laibowitz, T. R. McGuire, and R. J. Gambino, Phys. Rev. Lett. 58, 2684 (1987); M. Naito, R. H. Hammond, B. Oh, M. R. Hahn, J.W. P. Hsu, P. Rosenthal, A. F. Marshall, M. R. Beasley, T. H. Geballe, and A. Kapitulnik, J. Mater. Res. 2, 713 (1987); P. M. Mankiewich, J. H. Schofield, J.W. Skocpol, R. E. Howard, A. H. Dayem, and E. Good, Appl. Phys. Lett. 51, 1753 (1987).

    Google Scholar 

  2. R. Feenstra, T. B. Lindemer, J. D. Budai, and M. D. Galloway, submitted to J. Appl. Phys.

  3. X. D. Wu, A. Inam, T. Venkatesan, C. C. Chang, E.W. Chase, P. Barboux, J. M. Tarascon, and B. Wilkens, Appl. Phys. Lett. 52, 754 (1988); S. Witanachchi, H. S. Kwok, X.W. Wang, and D.T. Shaw, Appl. Phys. Lett. 53, 234 (1988); B. Roas, L. Schultz, and G. EndTes, Appl. Phys. Lett. 53, 1557 (1988); H. Adachi, K. Hirochi, K. Setsune, M. Kitabatake, and K. Wasa, Appl. Phys. Lett. 51, 2263 (1987); H. C. Li, G. Linker, F. Ratzel, R. Smithey, and J. Geerk, Appl. Phys. Lett. 52, 1098 (1988); C.B. Eom, J.Z. Sun, K. Yamamoto, A. F. Marshall, K.E. Luther, T. H. Geballe, and S. S. Laderman, Appl. Phys. Lett. 55, 595 (1989); D. K. Lathrop, S. E. Russek, and R. A. Buhrman, Appl. Phys. Lett. 51, 1554 (1987); T. Terashima, K. Iijima, K. Yamamoto, Y. Bando, and H. Mazaki, Jpn. J. Appl. Phys. 27, L91 (1988); J. Kwo, M. Hong, D. J. Trevor, R. M. Fleming, A. E. White, R. C. Farrow, A. R. Korton, and K.T. Short, Appl. Phys. Lett. 53, 2638 (1988); for a recent review see R. G. Humphreys, J. S. Satchell, N. G. Chew, J.A. Edwards, S.W. Goodyear, S. E. Blenkinsop, O. D. Dosser, and A. G. Cullis, Supercond. Sci. Technol. 3, 1 (1990).

    Google Scholar 

  4. See, for example, S. K. Streiffer, B. M. Lairson, C. B. Eom, A. F. Marshall, J. C. Bravman, and T. H. Geballe, in High Resolution Electron Microscopy of Defects in Materials, edited by U. Dahmen, R. Sinclair, and D. J. Smith (Mater. Res. Soc. Symp. Proc. 183, Pittsburgh, PA, 1990); R. Ramesh, D. M. Hwang, T. Venkatesan, T. S. Ravi, L. Nazar, A. Inam, X. D. Wu, B. Dutta, G. Thomas, A. F. Marshall, and T. H. Geballe, Science 247, 57 (1990); R. Ramesh, D. M. Hwang, T. S. Ravi, A. Inam, J. B. Barner, L. Nazar, S.W. Chan, C.Y. Chen, B. Dutta, T. Venkatesan, and X.D. Wu, Appl. Phys. Lett. 56, 2243 (1990); L.A. Tietz, C.B. Carter, D. K. Lathrop, S. E. Russek, R. A. Buhrman, and J. R. Michael, J. Mater. Res. 4, 1072 (1989); A. F. Marshall, A. Kapitulnik, K. Char, and R.W. Barton, in High-Temperature Superconductors: Fundamental Properties and Novel Materials Processing, edited by D. Christen, J. Narayan, and L. Schneemeyer (Mater. Res. Soc. Symp. Proc. 169, Pittsburgh, PA, 1990).

    Google Scholar 

  5. T. Hylton and M. R. Beasley, Phys. Rev. B 41, 11669 (1990).

    Article  CAS  Google Scholar 

  6. R. J. Cava, B. Batlogg, R. B. van Dover, D.W. Murphy, S. Sunshine, T. Siegrist, J. P. Remeika, S. Zahurak, and G. P. Espinosa, Phys. Rev. Lett. 58, 1676 (1987).

    Article  CAS  Google Scholar 

  7. R. Beyers, B.T. Ahn, G. Gorman, V.Y. Lee, S. S. P. Parkin, M. L. Ramirez, K. P. Roche, J. E. Vazquez, T. M. Giir, and R. A. Hug-gins, Nature 340, 619 (1990).

    Article  Google Scholar 

  8. R. H. Hammond, IEEE Trans. Magn. MAG-11, 201 (1975); R. H. Hammond, J. Vac. Sci. Technol. 15, 382 (1978).

    Google Scholar 

  9. N. Missert, R. H. Hammond, J. E. Mooij, V Matijasevic, P. Rosenthal, E. Garwin, T. H. Geballe, A. Kapitulnik, M. R. Beasley, S.S. Laderman, C. Lu, and R. Barton, IEEE Trans. Magn. MAG-25, 2418 (1988).

    Google Scholar 

  10. C. Lu, N. Missert, J. E. Mooij, P. Rosenthal, V. Matijasevic, M. R. Beasley, and R. H. Hammond, Proceedings of the Topical Conference on High Tc Superconducting Thin Films, Devices, and Applications at the 35th National Symposium of the American Vacuum Society, Atlanta, GA, October 3–7, 1988 (American Institute of Physics Conference Proceedings No. 182, 1989), p. 163.

  11. F. C. Fehsenfeld, K. M. Evenson, and H. P. Broida, Rev. Sci. Instrum. 36, 294 (1965).

    Article  Google Scholar 

  12. D. M. De Leeuw, R. Mooyman, and C. A. De Lange, Chem. Phys. Lett. 54, 231 (1978); J. A. R. Samson and P. N. Pareek, Phys. Rev. A 31, 1470 (1985).

    Google Scholar 

  13. D. D. Berkley, B. R. Johnson, N. Anand, K. M. Beauchamp, L. E. Conroy, A.M. Goldman, J. Maps, K. Mauersberger, M. L. Mecartney, J. Morton, M. Tuominen, and Y-J. Zhang, Appl. Phys. Lett. 53, 1973 (1988).

    Article  CAS  Google Scholar 

  14. G.A. Cook, A.D. Kiffer, C.V. Klumpp, A.H. Malik, and L.A. Spence, in Advances in Chemistry Series (American Chemical Society, Washington, DC, 1959), Vol. 21, p. 44; a good general reference on ozone and its production is M. Horváth, L. Bilitzky, and J. Hiittner, Ozone (Elsevier, Amsterdam, 1985).

    Google Scholar 

  15. W. R. Henderson and H. I. Schiff, Planet. Space Sci. 18, 1527 (1970).

    Article  Google Scholar 

  16. V. Matijasevic, E.L. Garwin, and R. H. Hammond, Rev. Sci. Instrum. 61, 1747 (1990).

    Article  CAS  Google Scholar 

  17. B. H. Moeckly, S. E. Russek, D. K. Lathrop, R. A. Buhrman, Jian Li, and J.W. Mayer, Appl. Phys. Lett. 57, 1687 (1990).

    Article  CAS  Google Scholar 

  18. D. M. Hwang, R. Ramesh, T. S. Ravi, C.Y. Chen, T. Venkatesan, A. Inam, L. Nazar, and S-W. Chan, presented at Symposium D, Mater. Res. Soc. 1990 Spring Meeting; T. S. Ravi, D. M. Hwang, S-W. Chan, L. Nazar, C.Y. Chen, A. Inam, and T. Venkatesan, submitted to Phys. Rev. B.

  19. Earlier data presented in R. Bormann and J. Nôlting, Appl. Phys. Lett. 54, 2148 (1989); R. H. Hammond and R. Bormann, Physica C 162–164, 703 (1989); have been superseded by a recent paper: R. Beyers and B.T. Ahn, submitted to Annual Review of Mater. Sci. The results differ by about a factor of two in pressure, with the newer data being below the previously reported data. The new data show that YBa2Cu3Oy is stable below the CuO stability line.

  20. R. G. Humphreys, N. Chew, J. A. Edwards, J. S. Satchell, S.W. Goodyear, and S. E. Blenkinsop, paper presented at the LT-19 Satellite Conference on High Temperature Superconductors, Cambridge, U.K., August 13–15, 1990.

  21. B. D. Cullity, Elements of X-ray Diffraction, 2nd ed. (Addison-Wesley, 1978), p. 359.

  22. C. B. Eom, A. F. Marshall, T. H. Geballe, and S. S. Laderman, Science 249, 1549 (1990).

    Article  CAS  Google Scholar 

  23. R. Ramesh, C.C. Chang, X. X. Xi, T. S. Ravi, D. M. Hwang, Q. Li, A. Inam, X. D. Wu, and T. Venkatesan, Appl. Phys. Lett. 57, 1064 (1990).

    Article  CAS  Google Scholar 

  24. T. Ishiguro, N. Ishizawa, N. Mizutani, and M. Kato, J. Solid State Chem. 49, 232 (1983).

    Article  CAS  Google Scholar 

  25. A. F. Marshall, V. Matijasevic, P. Rosenthal, K. Shinohara, R. H. Hammond, and M. R. Beasley, Appl. Phys. Lett. 57, 1158 (1990).

    Article  CAS  Google Scholar 

  26. B.T. Ahn, V.Y. Lee, R. Beyers, T.M. Gür, and R.A. Huggins, Physica C 167, 529 (1990).

    Article  CAS  Google Scholar 

  27. K. Borowiec and K. Kolbrecka, J. Less-Common Metals 163, 143 (1990).

    Article  CAS  Google Scholar 

  28. V. Matijasevic and R. H. Hammond (unpublished results).

  29. A. F. Marshall, K. Char, R.W. Barton, A. Kapitulnik, and S. S. Laderman, J. Mater. Res. 5, 2049 (1990).

    Article  CAS  Google Scholar 

  30. J. D. Jorgensen, B.W. Veal, A. P. Paulikas, L. J. Nowicki, G.W. Crabtree, H. Claus, and W. K. Kwok, Phys. Rev. B 41, 1863 (1990).

    Article  CAS  Google Scholar 

  31. C.B. Eom, J. Z. Sun, K. Yamamoto, A. F. Marshall, K.E. Luther, T. H. Geballe, and S.S. Laderman, Appl. Phys. Lett. 55, 595 (1989).

    Article  CAS  Google Scholar 

  32. S. J. Rothman, J.L. Routbort, and J.E. Baker, Phys. Rev. B 40, 8852 (1989); S.J. Rothman, J.L. Routbort, J-Z. Liu, J.W. Downey, L. J. Thompson, Y. Fang, D. Shi, J. E. Baker, J. P. Rice, D. M. Ginsberg, P. D. Han, and D. A. Payne, in Proc. Metall. Soc. Fall Meeting, 1–5 October, 1989, Indianapolis (Symp. on Atomic Migration and Defects in Materials), in press.

  33. D. K. Fork, D. B. Fenner, R.W. Barton, J. M. Phillips, G.A.N. Connell, J. B. Boyce, and T. H. Geballe, Appl. Phys. Lett. 57, 1161 (1990).

    Article  CAS  Google Scholar 

  34. The (00/) line intensity variations were previously reported also by O. Michikami, M. Asahi, and H. Asano, Jpn. J. Appl. Phys. 28, L91 (1989).

  35. C. B. Eom, J. Z. Sun, S. K. Streiffer, A. F. Marshall, B. M. Lairson, K. Yamamoto, S. M. Anlage, J. C. Bravman, T. H. Geballe, S. S. Laderman, and R. C. Taber, to appear in Physica C, November 1990.

  36. B. Roas, B. Hensel, G. Endres, L. Schultz, S. Klaumünzer, and G. Saemann-Ischenko, Physica C 162–164, 135 (1989); L. Schultz, B. Roas, P. Schmitt, and G. Endres, Proc. Conf. on Processing of Films for High Tc Superconducting Electronics, SPIE 1187, 204 (1989).

    Google Scholar 

  37. G.W. Morris, E. J. Tomlinson, R. E. Somekh, Z. H. Barber, E. J. Williams, M. P. Ray, and J. E. Evetts, presented at the ASC Conference, Boulder, CO, Sept. 1990.

  38. D. Schlom, Ph.D. Thesis, Stanford University.

  39. Cation disorder was first suggested for thin films by E.S. Hellman, D. G. Schlom, A. F. Marshall, S. K. Streiffer, J. S. Harris, Jr., M.R. Beasley, J.C. Bravman, T.H. Geballe, J.N. Eckstein, and C. Webb, J. Mater. Res. 4, 476 (1989).

    Article  Google Scholar 

  40. D. K. Fork and C-B. Eom (private communication).

  41. A good review is given by R. Beyers and T. M. Shaw, “The Structure of Y1Ba2Cu3O7−δ and Its Derivatives”, in Solid State Physics, edited by H. Ehrenreich and D. Turnbull (Academic Press, 1989), Vol. 42.

  42. R. D. Shannon, Acta Cryst. A 32, 751 (1976).

    Article  Google Scholar 

  43. Z. Iqbal, F. Reidinger, A. Bose, N. Cipollini, T. J. Taylor, H. Eckhardt, B. L. Ramakrishna, and E.W. Ong, Nature 331, 326 (1988).

    Article  CAS  Google Scholar 

  44. To our knowledge there was only one report of “heavy atom disorder” between Y and Ba which has not been fully substantiated: G. Van Tendeloo, H.W. Zandbergen, T. Okabe, and S. Amelinckx, Solid State Commun. 63, 969 (1987).

    Article  Google Scholar 

  45. The O6.75 tetragonal YBaCuO, so-called Tetr’a-I, was first reported by Nakazawa, M. Ishikawa, T. Takabatake, K. Koga, and K. Terakura, Jpn. J. Appl. Phys. 26, L796 (1987). There is mixed evidence whether this phase has any cation disorder. This phase is usually synthesized under high oxygen pressure conditions.

  46. E. S. Hellman, D. G. Schlom, N. Missert, K. Char, J. S. Harris, M. R. Beasley, A. Kapitulnik, T. H. Geballe, J. N. Eckstein, S. L. Weng, and C. Webb, J. Vac. Sci. Technol. B 6, 799 (1989).

    Article  Google Scholar 

  47. M.W. Shaffer, T. Penney, and B. Olsen, Phys. Rev. B 36, 4047 (1987).

    Article  Google Scholar 

  48. Y. Tokura, J. B. Torrance, T. C. Huang, and A.I, Nazzal, Phys. Rev. B 38, 7156 (1988).

    Article  CAS  Google Scholar 

  49. A. Tokiwa, Y. Syono, M. Kikuchi, R. Suzuki, T. Kajitani, N. Kobayashi, T. Sasaki, O. Nakatsu, and Y Muto, Jpn. J. Appl. Phys. 27, L1009 (1988).

  50. D. E. Morris, P. Narwankar, A. P. B. Sinha, K. Takano, and V.T. Shum, Phys. Rev. B 41, (1990).

  51. D. B. Mitzi, P.T. Feffer, J. M. Newsam, D. J. Webb, P. Klavins, A. J. Jacobson, and A. Kapitulnik, Phys. Rev. B 38, 6667 (1988).

    Article  CAS  Google Scholar 

Download references

Author information

Authors and Affiliations

  1. Department of Applied Physics, Stanford University, Stanford, California, 94305, USA

    V. Matijasevic, P. Rosenthal, K. Shinohara, A. F. Marshall, R. H. Hammond & M. R. Beasley

  2. Technishe Natuurkunde, TU Delft, Lorentzweg 1, CJ Delft, 2628, The Netherlands

    V. Matijasevic

  3. Central Engineering Laboratories, Nissan Motor Co., Ltd., 1, Natsushima, Yokosuka, Kanagawa, 237, Japan

    K. Shinohara

  4. Materials Research, Stanford University, Stanford, California, 94305, USA

    A. F. Marshall

Authors
  1. V. Matijasevic
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. P. Rosenthal
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. K. Shinohara
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. A. F. Marshall
    View author publications

    You can also search for this author in PubMed Google Scholar

  5. R. H. Hammond
    View author publications

    You can also search for this author in PubMed Google Scholar

  6. M. R. Beasley
    View author publications

    You can also search for this author in PubMed Google Scholar

Rights and permissions

Reprints and permissions

About this article

Cite this article

Matijasevic, V., Rosenthal, P., Shinohara, K. et al. Reactive coevaporation of YBaCuO superconducting films. Journal of Materials Research 6, 682–698 (1991). https://doi.org/10.1557/JMR.1991.0682

Download citation

  • Received:

  • Accepted:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1557/JMR.1991.0682

Search

Navigation