Skip to main content
Log in

Interdiffusion and Reaction of Pd on Atomically Stepped 6H-SIC Surfaces: Progress Toward Thermally Stable High Temperature Gas Sensors

  • Published:
MRS Online Proceedings Library Aims and scope

Abstract

High temperature Pd-SiC Schottky diode gas sensors are known to thermally degrade due to interdiffusion and reaction at the metal-semiconductor interface. To understand and possibly eliminate this problem, detailed surface studies of thermally induced Pd-SiC surface interactions have been performed. These experiments compare standard 6H-SiC (0001) surfaces typical of those used in device fabrication with periodically stepped surfaces prepared by high temperature hydrogen etching. The Pd films range in thickness from the monolayer level (~0.4 nm) to actual device dimensions (~46.5 nm) and are deposited under ultrahigh vacuum conditions at ~50 °C. These films are characterized in-situ using Auger electron spectroscopy both before and after annealing at 670 °C. The Auger lineshapes provide quantitative information on the chemistry of the reaction products. Ex-situ atomic force microscopy is used to characterize changes in surface morphology.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Similar content being viewed by others

References

  1. P.G. Neudeck, R.S. Okojie, and L-Y. Chen, Proc. IEEE 90, 1065 (2002).

    Article  Google Scholar 

  2. L. Unéus, P. Ljung, M. Mattsson, P. Mârtenssson, R. Wigren, P. Tobias, I. Lundström, L-G. Ekedahl, and A. Lloyd Spetz, Measurements with MISiC and MOS Sensors in Flue Gases, Proc. of Eurosensors XIII, The Hague, September 12–15, 521–524 (1999).

    Google Scholar 

  3. L-Y. Chen, G.W. Hunter, P.G. Neudeck, G. Bansal, J.B. Petit, and D. Knight, J. Vac. Sci. Technol. A15, 1228 (1997).

    Article  Google Scholar 

  4. V. Ramachandran, M.F. Brady, A.R. Smith, R.M. Feenstra, D.W. Greve, J. Electronic Materials 27 308 (1998).

    Article  CAS  Google Scholar 

  5. A.A. Woodworth, C.Y. Peng, C.D. Stinespring, and K. Meehan, (2004) (to be published).

  6. C. Kittel, Introduction to Solid State Physics, 7th Ed., John Wiley & Sons, Inc. (1996).

    Google Scholar 

  7. L.E. Davis, N.C. MacDonald, P.W. Palmberg, G.E. Riach, and R.E. Weber, Handbook of Auger Electron Spectroscopy, 2nd Ed., Physical Electronics, Eden Prairie Minnesota (1978).

    Google Scholar 

  8. V.M. Bermudez, Appl. Surf Sci. 17, 12 (1983).

    Article  CAS  Google Scholar 

  9. J.M. Lannon, J.S. Gold, and C.D. Stinespring, Appl. Phys. Lett. 73, 226 (1998).

    Article  CAS  Google Scholar 

Download references

Acknowledgments

The Department of Energy, the Defense Advanced Research Projects Agency, and the National Aeronautics and Space Administration have supported this research.

Author information

Authors and Affiliations

Authors

Rights and permissions

Reprints and permissions

About this article

Cite this article

Stinespring, C.D., Peng, C.Y., Woodworth, A.A. et al. Interdiffusion and Reaction of Pd on Atomically Stepped 6H-SIC Surfaces: Progress Toward Thermally Stable High Temperature Gas Sensors. MRS Online Proceedings Library 828, 291–296 (2004). https://doi.org/10.1557/PROC-828-A7.10

Download citation

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1557/PROC-828-A7.10

Navigation