Abstract
A method to fabricate biocompatible polymer microfluidic systems with integrated electrical and fluid functionality has been established. The process flow utilizes laser ablation, microstenciling, and heat staking as the techniques to realize multi-layered polyimide based microsystems with microchannels, thru and embedded fluid / electrical vias, and metallic electrodes and contact pads. As an application of the fabrication technology, a six layer multi-functional cellular analysis system has been demonstrated. The electrophysiological analysis system contains fluid microchannel / via networks for cell positioning and chemical delivery as well as electrical detectors and electrodes for impedance spectroscopy and patch clamping studies. Multiple layers of 50.8µm thick Kapton® sheets with double-sided polyimide adhesive layers were used as the primary material-of-construction. Microchannels with widths of 400µm as well as thru hole vias with 3.71µm diameters (aspect ratios of over 12:1) were laser ablated through the polyimide sheets using an excimer laser and a CO2 laser. Electrical traces and contact pads with features down to 20µm were defined on the flexible polyimide sheets using microstenciling. The patterned layers were bonded using heat staking at a temperature of 350°C, a pressure of 1.65MPa for 60 minutes. This multi-layer technology can be used to create microfluidic devices for many application areas requiring biocompatibility, relatively high temperature operation, or a flexible substrate material.
This is a preview of subscription content, log in via an institution to check access.
Similar content being viewed by others
References
N. Fertig, R. H. Blick, and J. C. Behrends, “Whole cell patch clamp recording performed on a planar glass chip,” Biophysical Journal, vol. 82, no. 6, pp. 3056–3062, 2002.
K. Cheung, T. Kubow, and L. P. Lee, “Individually addressable planar patch clamp array,” in Second Annual International IEEE-EMB Special Topic Conference on Microtechnologies in Medicine & Biology, 2002, pp. 71–75.
B. Matthews and J. W. Judy, “Characterization of a micromachined planar patch clamp for cellular electrophysiology,” in Proceedings of the First International IEEE EMBS Conference on Neural Engineering, 2003, vol. 3, pp. 648–651.
G. Medoro, N. Manaresi, A. Leonardi, L. Altomare, M. Tartagni, and R. Guerrieri, “A lab- on-a-chip for cell detection and manipulation,” IEEE Sensors Journal, vol. 3, no. 3, pp. 317–325, 2003.
H. Andersson and A. van den Berg, “Microfluidic devices for cellomics: a review,” Sensors and Actuators B, vol. 92, pp. 315–325, 2003.
A. Han, O. Wang, M. Graff, S. K. Mohanty, T. L. Edwards, K. Han, and A. B. Frazier, “Multi-layer plastic/glass microfluidic system containing electrical and mechanical functionality,” Lab On A Chip, vol. 3, pp. 150–157, 2003.
F. Laerme, A. Achilp, K. Funk, and M. Offenberg, “Bosch deep silicon etching: improving uniformity and etch rate for advanced MEMS applications,” in Proceedings of the Twelfth IEEE International Conference on Micro Electro Mechanical Systems, 1999, pp. 211–216.
Acknowledgments
This work was supported by the National Institute of Health (NIH) / National Institute on Deafness and Other Communication Disorders (NIDCD) under Grant DC04928. Collaboration with DuPont® High Performance Materials on the Kapton® sheet materials and processes has been instrumental in this research.
Author information
Authors and Affiliations
Rights and permissions
About this article
Cite this article
Moss, E.D., Han, A. & Frazier, A.B. A Multi-layer Technology for Biocompatible Polymer Microsystems with Integrated Fluid and Electrical Functionality. MRS Online Proceedings Library 820, 178–183 (2004). https://doi.org/10.1557/PROC-820-O8.13
Published:
Issue Date:
DOI: https://doi.org/10.1557/PROC-820-O8.13