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The Influence of Light-Soaking and Atmospheric Adsorption on Microcrystalline Silicon Films studied by Coplanar Transient Photoconductivity

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Abstract

A study of the effects of light-soaking and atmospheric adsorption (aging) on the dark- and photo-conductivity of a series of microcrystalline silicon films of varying crystallinity is presented. Light-soaking in vacuum slightly reduces photoconductivity in films close to the amorphous–microcrystalline transition, and there is also a reduction in dark current. Aging increases the dark current, and thus unless due care is taken during light-soaking experiments to eliminate or compensate for aging, the apparent effect of light-soaking may be reduced or even reversed in sign. Transient photocurrent decays confirm the presence of a large density of metastable light-induced defects. A shift in the apparent distribution of defects occurs on prolonged aging, which may be due either to changes in the DOS or a shift in the Fermi level.

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Acknowledgments

The authors thank A. Lambertz, S. Michel and T. Dylla of IPV Julich for deposition and characterization of samples.

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Authors and Affiliations

  1. EPICentre, School of Computing and Advanced Technologies, University of Abertay Dundee, Bell Street, Dundee, DD1 1HG, UK

    V. Smirnov, S. Reynolds & C. Main

  2. Forschungszentrum Jülich, IPV, D-52425, Julich, Germany

    F. Finger & R. Carius

Authors
  1. V. Smirnov
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  2. S. Reynolds
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  3. F. Finger
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  4. C. Main
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  5. R. Carius
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Smirnov, V., Reynolds, S., Finger, F. et al. The Influence of Light-Soaking and Atmospheric Adsorption on Microcrystalline Silicon Films studied by Coplanar Transient Photoconductivity. MRS Online Proceedings Library 808, 461–466 (2003). https://doi.org/10.1557/PROC-808-A9.11

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  • DOI: https://doi.org/10.1557/PROC-808-A9.11

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