Skip to main content
SpringerLink
Log in

Low Temperature Laser-Assisted Gas Phase Reactivity of TMGa with NH3 and Oxygen-Containing Compounds (H2O, CH3OH, O(CH3)2) in Constrained Pulsed Expansions

  • Published:
MRS Online Proceedings Library Aims and scope

Abstract

The present work reports on the study of III-V gas phase reactivity in constrained gas pulse expansions of trimethylgallium (TMGa) and oxygen derivative compounds (H2O, CH3OH, O(CH3)2) with and without ammonia. The precursors are introduced separately into a high vacuum chamber via a multipulsed gas nozzle assembly. The gas mixtures are then exposed to a UV pulse from an ArF excimer laser (λ=193 nm) and the products are mass analyzed with a quadrupole mass spectrometer. The efficient laser-assisted growth of Ga-O-containing clusters in the form of [(CH3)2GaOR] x, where R is H or CH3, has been revealed. Different behavior can be seen in the reaction of TMG and the oxygen species depending on the presence of H atoms bonded to the oxygen. Significant influence of NH3 on cluster formation and oxygen incorporation is demonstrated.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Similar content being viewed by others

References

  1. A. Demchuk, J. Porter, A. Beuscher, A. Dilkey, and B. Koplitz, Chem. Phys. Lett. 283, 231 (1998).

    Article  CAS  Google Scholar 

  2. A. Demchuk, J. Porter, and B. Koplitz, J. Phys. Chem. A 102, 8841 (1998).

    Article  CAS  Google Scholar 

  3. A. Demchuk, S. Simpson and B. Koplitz in Fundamental Gas-Phase and Surface Chemistry of Vapor-Phase Deposition II,edited by M.T. Swihart, M.D. Allendorf, and M. Meyyappan, (Electrochem. Soc. Proc. 2001–13, Pennington, NJ, 2001) pp. 389–396.

  4. G. E. Coates, J. Chem. Soc. 2003, 1951.

  5. A. Zaouk, E. Salvetat, J. Sakaya, F. Maury, and G. Constant, J. Crystal Growth. 55, 135 (1981).

    Article  CAS  Google Scholar 

  6. R. H. Moss, J. Crystal Growth 68, 78 (1984).

    Article  CAS  Google Scholar 

  7. M. J. Almond, M. G. B. Drew, C. E. Jenkins, and D. A. Rice J. Chem. Soc. Dalton Trans. 1, 5 (1992).

    Article  Google Scholar 

  8. R. M. Watwe, J. A. Dumesic, T. F. Kuech, J. Cryst. Growth. 221, 751 (2000).

    Article  CAS  Google Scholar 

  9. J. S. Thayer, Organometallic Chemistry, (VCH Publisher, Inc: New York, 1988) pp.31–38.

  10. U. Bergman, V. Reimer, and B. Atakan, Phys. Stat. Sol. (a) 176, 719 (1999).

    Article  Google Scholar 

  11. A. Demchuk, J. Cahill, S. Simpson and B. Koplitz, Chem. Phys. Lett. 348, 217 (2001).

    Article  CAS  Google Scholar 

Download references

Author information

Authors and Affiliations

  1. Department of Chemistry, Tulane University, 70118, New Orleans, LA, U.S.A.

    Michael Lynch, Steven Simpson & Brent Koplitz

  2. APA Optics, Inc., 2950 NE 84th Lane, 55449, Blaine, MN, U.S.A.

    Alexander Demchuk

Authors
  1. Alexander Demchuk
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. Michael Lynch
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. Steven Simpson
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. Brent Koplitz
    View author publications

    You can also search for this author in PubMed Google Scholar

Rights and permissions

Reprints and permissions

About this article

Cite this article

Demchuk, A., Lynch, M., Simpson, S. et al. Low Temperature Laser-Assisted Gas Phase Reactivity of TMGa with NH3 and Oxygen-Containing Compounds (H2O, CH3OH, O(CH3)2) in Constrained Pulsed Expansions. MRS Online Proceedings Library 743, 37 (2002). https://doi.org/10.1557/PROC-743-L3.7

Download citation

  • Published:

  • DOI: https://doi.org/10.1557/PROC-743-L3.7

Search

Navigation