Skip to main content
SpringerLink
Log in

Quantitative High-Resolution Transmission Electron Microscopy of III-V Semiconductor Interfaces by Multivariate Statistical Analysis of Exit-Plane Wave Function Images

  • Published:
MRS Online Proceedings Library Aims and scope

Abstract

The application of exit-plane wave function (EPWF) images for an atomic-scale compositional mapping of interfaces in the GaAs-AlAs system is investigated. Image simulations based on the multislice algorithm were performed to obtain EPWF images over a wide range of compositions and specimen thicknesses. The EPWF-amplitude images were further analyzed by the method of factorial analysis of correspondence. A simultaneous analysis of the effects both thickness and composition on image contrast yielded two eigenvectors representing the individual contributions from the two effects. This separation was however not complete, leaving a residual contribution from thickness on the composition-sensitive eigenvector and vice versa. Extraction of the chemical content from the composition-sensitive eigenvector is still possible by a parameterization of the residual thickness contribution. A simpler procedure for quantifying the composition across an interface is proposed based on the analysis of images of AlxGa(1-x)As with different Al/Ga composition but same specimen thickness.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Similar content being viewed by others

References

  1. A. Ourmazd, F. H. Baumann, M. Bode and Y. Kim, Ultramicroscopy 34, 237 (1990).

    Article  Google Scholar 

  2. S. Thoma and H. Cerva, Ultramicroscopy 38, 265 (1991).

    Article  CAS  Google Scholar 

  3. A. Rosenauer, U. Fischer, D. Gerthsen, A. Forster, Ultramicroscopy 72, 121 (1998).

    Article  CAS  Google Scholar 

  4. W. M. J. Coene, A. Thust, M. Op de Beeck, D. Van Dyck, Ultramicroscopy 64, 167 (1996).

    Article  Google Scholar 

  5. M. A. O’keefe, C. J. D. Hetherington, Y. C. Wang, E. C. Nelson, J. H. Turner, C. Kisielowski, J. O. Malm, R. Mueller, J. Ringnalda, M. Pan and A. Thust, Ultramicroscopy 89, 215 (2001).

    Article  Google Scholar 

  6. A. Thust, W. M. J. Coene, M. Op de Beeck, D. Van Dyck, Ultramicroscopy 64, 211 (1996).

    Article  CAS  Google Scholar 

  7. P. Trebbia and N. Bonnet, Ultramicroscopy 34, 165 (1990).

    Article  CAS  Google Scholar 

  8. J. E. Aebersold, P. A. Stadelman and J. L. Rouviere, J. Microsc. 62, 171 (1996).

    CAS  Google Scholar 

  9. E. R. Maunowski and D. G. Howery, Factor Analysis in Chemistry, (Wiley-Interscience, 1980) pp. 23.

    Google Scholar 

  10. N. Bonnet, J. Microsc. 190, 2 (1990).

    Article  Google Scholar 

  11. J. L. Roviere and N. Bonnet, Inst. Phys. Conf. Ser. 134, 11 (1993).

    Google Scholar 

  12. M. A. Okeefe, High-Resolution Transmission Electron Microscopy and Associated Techniques, ed. P. Buseck, J. Cowley and L. Eyring (Oxford University Press, 1988) pp. 244.

  13. C. Kisielowski, P. Schwander, P. Baumann, F. H. Seibt, M. Kim and A. Ourmazd, Ultramicroscopy 58, 131 (1995).

    Article  CAS  Google Scholar 

Download references

Author information

Authors and Affiliations

  1. Air Force Research Laboratory, Materials & Manufacturing Directorate, AFRL/MLPS, 3005 P St., Wright-Patterson AFB, OH, 45433-7707, USA

    Krishnamurthy Mahalingam, Kurt G. Eyink, Gail J. Brown & Donald L. Dorsey

Authors
  1. Krishnamurthy Mahalingam
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. Kurt G. Eyink
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. Gail J. Brown
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. Donald L. Dorsey
    View author publications

    You can also search for this author in PubMed Google Scholar

Rights and permissions

Reprints and permissions

About this article

Cite this article

Mahalingam, K., Eyink, K.G., Brown, G.J. et al. Quantitative High-Resolution Transmission Electron Microscopy of III-V Semiconductor Interfaces by Multivariate Statistical Analysis of Exit-Plane Wave Function Images. MRS Online Proceedings Library 727, 91 (2002). https://doi.org/10.1557/PROC-727-R9.1

Download citation

  • Published:

  • DOI: https://doi.org/10.1557/PROC-727-R9.1

Search

Navigation