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Microstructure of YBCO and YBCO/SrTiO3/YBCO* PLD Thin Films on Sapphire for Microwave Applications

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Abstract

A large-area pulsed laser deposition process for high-quality YBa2Cu3O7−δ (YBCO) thin films on both sides of R-plane sapphire substrates with CeO2 buffer layer is used routinely to optimize planar microwave filters for satellite and mobile communication systems. With the experience of more than 700 double-sided 3-inch diam. YBCO:Ag films a high degree of reproducibility of jc values above 3.5 MA/cm2 and of state of the art R5 values is reached. TEM cross sections of the large-area and double-sided PLD-YBCO:Ag thin films on R-plane sapphire with CeO2 buffer layers show typical defects like stress modulation, stacking faults, a-axis oriented grains, precipitates and interdiffusion layers. YBCO films on SrTiO3 / YBCO* / CeO2 film systems on R-plane sapphire wafers have more growth defects compared to bare CeO2 buffers on sapphire but show as microwave resonators encouraging electrical tunability.

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Authors and Affiliations

  1. Universität Leipzig, Fakultät für Physik und Geowissenschaften, D-04103, Leipzig, Germany

    M. Lorenz, H. Hochmuth, D. Natusch & T. Thärigen

  2. National Center for High Resolution Electron Microscopy, 2628, AL, Delft, The Netherlands

    V. L. Svetchnikov & H. W. Zandbergen

  3. Max-Planck-Institut für Mikrostrukturphysik, D-06120, Halle/Saale, Germany

    C. Schäfer, G. Kästner & D. Hesse

Authors
  1. M. Lorenz
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  2. H. Hochmuth
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  3. D. Natusch
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  4. T. Thärigen
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  5. V. L. Svetchnikov
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  6. H. W. Zandbergen
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  7. C. Schäfer
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  8. G. Kästner
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  9. D. Hesse
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Correspondence to M. Lorenz.

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Lorenz, M., Hochmuth, H., Natusch, D. et al. Microstructure of YBCO and YBCO/SrTiO3/YBCO* PLD Thin Films on Sapphire for Microwave Applications. MRS Online Proceedings Library 603, 163–168 (1999). https://doi.org/10.1557/PROC-603-163

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  • DOI: https://doi.org/10.1557/PROC-603-163

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