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Formation of New Interfacial Fhases in Bimetallic Thin Film Couples Studied by in Situ Annealing X-Ray Diffraction

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Abstract

Interfacial reactions in bimetallic thin films have been studied by in-situ glancing angle X-ray diffraction which enables us to monitor all stages of the interface reaction in the temperature range 35°–950°C. Results are presented on new phase formation in evaporated Ag-Al and Cu-Al thin film couples, sputtered bimetallic Nb-Sn and Nb-Pb films and magnetic alloy films. New phases as well as phase transitions which are not known to exist in the bulk phase diagrams, were observed. These results provided evidence that phases other than those predicted by the first nucleation rule, grow during the initial metal-metal thin film interface reaction.

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  1. AT & T Bell Laboratories, Murry Hill, NJ, 07974

    J. M. Vandenberg

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  1. J. M. Vandenberg
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Vandenberg, J.M. Formation of New Interfacial Fhases in Bimetallic Thin Film Couples Studied by in Situ Annealing X-Ray Diffraction. MRS Online Proceedings Library 54, 171–174 (1985). https://doi.org/10.1557/PROC-54-171

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  • DOI: https://doi.org/10.1557/PROC-54-171

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