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In-Situ Diagnostics at High Pressures: Ellipsometric and Rheed Studies of the Growth of Yba2Cu3O7

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Abstract

Pulsed Laser and Sputter Deposition are used for the fabrication of complex oxide thin films at relatively high oxygen pressures (up to 0.5 mBar). This high pressure hampers the application of a number of in-situ diagnostic tools. One of the exceptions is ellipsometry. Using this technique we studied in-situ the growth of off-axis sputtered Yba2Cu3O6+x thin films on (001) SrTiO3 as a function of the deposition parameters. Furthermore, the oxidation process from O(6) to O(7) has been studied by performing spectroscopic ellipsometry during isobaric cooling procedures.

Another suitable in-situ monitoring technique for the growth of thin films is Reflection High Energy Electron Diffraction (RHEED). In general this is a (high) vacuum technique. Here, we present an RHEED-system in which we can observe clear diffraction patterns up to a deposition pressure of 0.5 mBar. The system has been used for in-situ monitoring of the heteroepitaxial growth of YBa2Cu3 06+x on SrTiO3 by pulsed laser deposition.

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References

  1. Marcel E. Bijlsma, Anin-situ ellipsometric study oh high Tc superconducting thin film growth, Thesis, University of Twente, ISBN 90-3650827-4 (1996).

    Google Scholar 

  2. M.E. Bijlsma, D.H.A. Blank, H. Wormeester, A. van Silfhout, H. Rogalla, J. Alloys and Comp., 251 (1997) pp. 15–18.

    Article  CAS  Google Scholar 

  3. J. Kircher, M.K. Kelly, S. Rashkeev, M. Alouani, D. Fuchs and M. Cardona, Phys. Rev. B44, (1991), pp. 217.

    Article  Google Scholar 

  4. M.G. Lagally, D.E. Savage, and M.C. Tringides, NATO ASI Series, Series B, Physics, 239, cop. 1990, New York, Plenum Press in cooperation with NATO Scientific Affairs Division, pp. 139–174.

    Google Scholar 

  5. T. Terashima, Y Bando, K. Iijima, K. Yamamoto, K. Hirata, K. Hayashi, K. Kamigaki, and H. Terauchi, Phys. Rev. Lett. 65 (1990) pp. 2684–2687.

    Article  CAS  Google Scholar 

  6. H. Karl and B. Stritzker, Phys. Rev. Lett. 69 (1992) pp. 2939–2942.

    Article  CAS  Google Scholar 

  7. H. Karl and B. Stritzker, IEEE Trans. Appl. Supercond. 3 (1993) pp. 1594–1597.

    Article  Google Scholar 

  8. H. Karl and B. Stritzker, Mat. Res. Soc. Symp. Proc. 285 (1993) pp. 269–274.

    Article  CAS  Google Scholar 

  9. M.Y. Chern, A. Gupta, and B.W. Hussey, Appl. Phys. Lett. 60 (1992) pp. 3045–3047.

    Article  CAS  Google Scholar 

  10. Stephen E. Russek, Alexana Roshko, Steven C. Sanders, David A. Rudman, J.W. Ekin, and John Moreland, Mat. Res. Soc. Symp. Proc. 285 (1993) pp. 305–310.

    Article  CAS  Google Scholar 

  11. Hideomi Koinuma, Hirotoshi Nagata, Tadashi Tsukahara, Satoshi Gonda, and Mamoru Yoshimoto, Appl. Phys. Lett. 58 (1991) pp. 2027–2029.

    Article  CAS  Google Scholar 

  12. H. Koinuma, M. Yoshimoto, M. Kawasaki, H. Ohkubo, N. Kanda, and J.P. Gong, Mat. Res. Soc. Symp. Proc. 285 (1993) pp. 263–268.

    Article  CAS  Google Scholar 

  13. I. Kawayama, M. Kanai, and T. Kawai, Jpn. J. Appl. Phys. 35 (1996) pp. 926–929.

    Article  Google Scholar 

  14. N. Chandrasekhar, V.S. Achutharaman, V. Agrawal, and A.M. Goldman, Phys. Rev. B 46 (1992) pp. 8565–8572.

    Article  CAS  Google Scholar 

  15. K. Hirata, F. Baudenraucher, and H. Kinder, Physica C 214 (1993) pp. 272–276.

    Article  CAS  Google Scholar 

  16. Guus J.H.M. Rijnders, Gertjan Koster, Dave H.A. Blank, and Horst Rogalla, Appl. Phys. Lett. 70 (1997) pp. 1888–1890.

    Article  CAS  Google Scholar 

  17. R.H. Hammond and R. Bormann, Physica C 162-164 (1989) pp. 703.

    Article  CAS  Google Scholar 

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Acknowledgments

We gratefully acknowledge Marcel E. Bijlsma, Edward Span, Herbert Wormeester, for their work and discussions on the ellipsometric experiments and Guus J.H.M. Rijnders, Gertjan Koster, Joost Heutink and Boike L. Kropman for their work and discussions on the reflection high energy electron diffraction experiments. The analyses were performed in the Center of Materials Science (CMO) of the University of Twente. This work is supported by the Dutch science foundation (FOM).

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Authors and Affiliations

  1. Low Temperature Division, Dept. of Applied Physics, University of Twente, Enschede, Netherlands

    Dave H. A. Blank & Horst Rogalla

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  1. Dave H. A. Blank
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  2. Horst Rogalla
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Correspondence to Dave H. A. Blank.

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Blank, D.H.A., Rogalla, H. In-Situ Diagnostics at High Pressures: Ellipsometric and Rheed Studies of the Growth of Yba2Cu3O7. MRS Online Proceedings Library 502, 237–247 (1997). https://doi.org/10.1557/PROC-502-237

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