Abstract
Recent Raman experiments show that strain in GaN layers grown on the c-plane of sapphire is low at the surface, increases with depth, and is maximum at the interface. We show that this stress distribution can be attributed to the presence of a large number of threading dislocations. GaN photonic devices work in spite of large density of dislocations present in the GaN epilayers. We describe a model which shows that the effect of saturation of traps in the dislocations with increasing number of injected carriers can explain the high performance of the GaN devices containing the dislocations.
Similar content being viewed by others
References
(a) MRS Bulletin Vol.22, (Feb. 1997); (b) Mat. Res. Soc. Symp. Proc. Vol. 449 (1997).
S. C. Jain, Germanium-Silicon Strained Layers and Heterostructures, Advances in Electronics and Electron Physics series, Suppl. 24 (Academic Press, Boston 1994).
J. W. Ager III, T. Suski, S. Ruvimov, J. Krueger, G. Conti, E. R. Weber, M. D. Bremser, R. Davis, and C. P. Kuo, Mat. Res. Soc. Symp. Proc. 449, 775 (1997).
H. Siegle, A. Hoffmann, L. Eckey, C. Thomsen, T. Detchprohm, K. Hiramatsu, T. Davis, and J. W. Steeds, Mat. Res. Soc. Symp. Proc. 449, 677 (1997).
S. C. Jain, K. Pinardi, M. Willander, A. Atkinson, H. E. Maes, and R. Van Overstraeten, Semicond. Sci. Technol. 12, 1507 (1997).
T. Kozawa, T. Kachi, H. Kano, H. Nagasawa, N. Koide, and K. Watnabe, J. Appl. Phys. 77, 4389 (1995).
N. Lovergine, L. Liaci, J. D. Ganiere, G. Leo, A. V. Drigo, F. Romanato, A. M. Mancini, and L. Vasanelli, J. Appl. Phys. 78, 229 (1995).
Values of ρc, are not known with any certainty. Different authors have used different values of this parameter [2].
P. De Pauw, R. Mertens, R. Van Overstraeten, and S. C. Jain, Solid State Electronics 25, 67 (1984).
Author information
Authors and Affiliations
Rights and permissions
About this article
Cite this article
Jain, S.C., Pinardi, K., Maes, Η.E. et al. Dislocations in GaN/Sapphire: Their Distribution and Effect on Stress and Optical Properties. MRS Online Proceedings Library 482, 880–885 (1997). https://doi.org/10.1557/PROC-482-875
Published:
Issue Date:
DOI: https://doi.org/10.1557/PROC-482-875