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Ferroelectric Films as a Fashion Object for Polycrystalline Film Investigation

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Abstract

BaxSr1-xTiO3 (BST), PbZrxTi1-xO3 (PZT) and two layer PZT-BST films were prepared on Pt, Si(100) and Si(111) substrates by a sol-gel method. XRD analysis shows that the PZT films on the Si(111) substrates tended to be preferentially oriented in the (110) direction. The nondestructive readout of the state of ferroelectric polarization was investigated by three methods: the pyroelectric effect, the non-linearity of the capacitance and the field effect in MOS structures. It is shown that all three methods provide nondestructive readout, and the choice between them depends on the intended use.

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Acknowledgement

This work has been carried out with the financial support of the program "Cooperation in Applied Science and Technology" of the National Research Council.

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Authors and Affiliations

  1. Department of Ceramic Engineering, University Missouri-Rolla, Rolla, MO, 65401, USA

    V. Petrovsky, H. U. Anderson & M. Shumsky

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  1. V. Petrovsky
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  2. H. U. Anderson
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  3. M. Shumsky
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Petrovsky, V., Anderson, H.U. & Shumsky, M. Ferroelectric Films as a Fashion Object for Polycrystalline Film Investigation. MRS Online Proceedings Library 472, 251–256 (1997). https://doi.org/10.1557/PROC-472-251

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