Abstract
The present findings concern the CVD deposition of diamond films on Ti substrates and the presence of a stratification of other various phases (Titanium Carbide, Titanium Hydride and Graphite) through the thickness of the CVD coatings.
The reflection high energy electron diffraction (RHEED) technique is mainly used to gain insight into the structure of the various phases generated at the diamond/substrate interface.
The experimental results seem to indicate that the structure of the transition layers present at the substrate/film interface play a fundamental role for the control of the heterogeneous nucleation process of the diamond.
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Acknowledgments
This work was partially supported by CNR (Consiglio Nazionale Ricerche) -CT1, by INFN (Istituto Nazionale Fisica Nucleare)-Legnaro and by INFM (Istituto Nazionale Fisica Materia).
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Rossi, M., Terranova, M.L., Sessa, V. et al. Diamond Film CVD Synthesis on Titanium: Experimental Evidence of the Intermediate Phases at the Film/Substrate Interface. MRS Online Proceedings Library 416, 235–240 (1995). https://doi.org/10.1557/PROC-416-235
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DOI: https://doi.org/10.1557/PROC-416-235