Abstract
Large two dimensional amorphous silicon image sensor arrays offer a new approach to electronic document input and x-ray imaging. The sensor array technology is now capable of image capture at greater than 10 frames/sec and with resolution of 200–400 spi. We describe our new high resolution imaging system, comprising a page-sized sensor array with nearly 3 million pixels, and the accompanying high speed read out and processing electronics. The key technological issues of pixel resolution, sensor fill factor, leakage currents and noise are reviewed. Measurements of a new array architecture are described, in which the sensor is formed as a single continuous film on top of the matrix addressing components.
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Street, R.A., Wu, X.D., Weisfield, R. et al. Two Dimensional Amorphous Silicon Image Sensor Arrays. MRS Online Proceedings Library 377, 757–766 (1995). https://doi.org/10.1557/PROC-377-757
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DOI: https://doi.org/10.1557/PROC-377-757