Abstract
Laser produced plumes from a GeO2 target were investigated using both optical emission spectroscopy and laser induced fluorescence. Elemental neutral and ionic Ge and diatomic GeO were monitored as a function of O2 pressure at 4 cm from the target surface. Data obtained from laser fluorescence experiments showed no indication of chemical production of GeO in these plumes under any conditions studied; however, the atomic emission intensities of several ionic and neutral Ge lines appeared to increase with O2 pressure. This signified plume interactions with the background gas. The trends in the species concentrations were determined and the results are interpreted with respect to mechanisms for thin film growth.
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Wolf, P.J., Patterson, B.M. & Witanachchi, S. Spectroscopic Investigations of Laser Ablated Germanium Oxide. MRS Online Proceedings Library 334, 347–352 (1993). https://doi.org/10.1557/PROC-334-347
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DOI: https://doi.org/10.1557/PROC-334-347