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In-situ Multilayer Film Growth Characterization by Brewster Angle Reflectance Differential Spectroscopy

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Abstract

Brewster Angle Reflectance Differential Spectroscopy (BARDS) has been proposed as an optical method for real-time characterization of the growth of thin films. BARDS is based on changes in the reflectivity, Rp, of parallel (p)-polarized light incident at, or near, the Brewster angle of the substrate material. Changes in R are sufficiently large to monitor layer growth, and to determine the thickness and the optical constants of the deposited film. In this paper we extend the method to multilayer film deposition. The derivative properties of R are correlated with differences in the optical constants of the two materials, and with the sharpness of their interface. We present spectra for SiO2/Si3N4/SiO2/Si, demonstrating some of these aspects of this new and effective approach to in-situ monitoring.

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Acknowledgments

The authors would like to thank C.G. Parker for RPECVD processing. This research is supported by the NSF grant CDR 8721505.

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Authors and Affiliations

  1. North Carolina State University, Raleigh, NC, 27695, USA

    N. Dietz, D. J. Stephens, G. Lucovsky & K. J. Bachmann

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  1. N. Dietz
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  2. D. J. Stephens
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  3. G. Lucovsky
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  4. K. J. Bachmann
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Dietz, N., Stephens, D.J., Lucovsky, G. et al. In-situ Multilayer Film Growth Characterization by Brewster Angle Reflectance Differential Spectroscopy. MRS Online Proceedings Library 324, 27–32 (1993). https://doi.org/10.1557/PROC-324-27

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  • DOI: https://doi.org/10.1557/PROC-324-27

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