Abstract
PLZT thin layers were deposited onto various substrates by sol-gel methods, and crystallized under different conditions and substrate treatments. Relationships are given for the chemical characteristics of the substrate’s surface and the preferred orientations which develop on heat treatment. A preferred (111) orientation always developed for perovskite crystallized on Pt layers which contained Ti on the surface. This was attributed to the formation of Pt3Ti and the role of heteroepitaxial nucleation and growth sites. In addition, a preferred (100) orientation was also obtained on unarmealed Pt/Ti/SiO2/Si substrates which were free of Ti on the surface. This was attributed to self-textured growth with flat faces striving for minimum surface energy conditions. The results are discussed in terms of the importance of interfacial chemistry on the control of texture for crystallization of PLZT thin layers on coated substrates.
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Acknowledgments
The authors are grateful to Mr. M. Toyoda of Murata Manufacturing Company and Mr. P. Schuele of Ramtron Corporation for supplying some of the substrates used and the metal layer combinations. The research was supported by DOE DMR-FG02-91ER45439 and by a grant from Toyota CRDL. The use of facilities in the Center for Microanalysis of Materials in the Materials Research Laboratory at the University of Illinois is gratefully acknowledged.
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Tani, T., Xu, Z. & Payne, D.A. Preferred Orientations for Sol-Gel Derived PLZT Thin Layers. MRS Online Proceedings Library 310, 269–274 (1993). https://doi.org/10.1557/PROC-310-269
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DOI: https://doi.org/10.1557/PROC-310-269