Abstract
Light emitting nanocrystalline silicon has been prepared by a completely dry processing which uses standard silicon technology. This enables us to prepare compact films on various substrates and to control the crystallite size. Dependence of the photoluminescence intensity and its peak energy on the crystallite size is reported and compared with current theoretical models.
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References
V. Lehmann and U. Gösek, Appl. Phys. Lett. 58, 856 (1991).
L. T. Cunham, Appl. Phys. Lett. 57, 1046 (1990).
E. Bustarret, M. Ligeon, J. C. Bruyere, F. Muller, R. Heerino, F. Gaspard, L. Ortega and M. Stutzmann, Appl. Phys. Lett. 61, 1552 (1992).
R. E. Hummel and Sung-Sig Chang, Appl. Phys. Lett. 61, 1965 (1992), MRS Symp. Proc. 283 (Fall Meeting, Boston, Dec. 1992, in press).
H. Takagi, H. Ogawa, Y. Yamazahi, A. Ishizaki and T. Nakagiri, Appl. Phys. Lett. 56, 2379 (1990).
L. Brus, Appl. Phys. A 53, 465 (1991).
Y. Maeda, H. Uto, Y. Kanemitsu and Y. Masumoto, Int. Conf, on Solid State Devices and Materials, Tsukuba 1992, MRS Symp. Proc. 283 (Fall Meeting, Boston, Dec. 1992, in press).
J. R. Heath, this volume, paper B 4.1.
S. Berhane, S. M. Kauzlarich, K. Nishimura, R. L. Smith, M. L. S. Olson, H. W. H. Lee and L. L. Chase, this volume, paper B 4.2.
M. Rückschloß, B. Landkammer, O. Ambacher and S. Vepfek, MRS Symp. Proc. 283 (Fall Meeting, Boston, Dec. 1992, in press).
M. Rückschloß, B. Landkammer and S. Veprek, Appl. Phys. Lett., submitted.
S. M. Sze, Physics of Semiconductor Devices, J. Wiley & Sons Inc., Singapore 1981.
H. P. Klug, L. E. Alexander, X-Ray Diffraction Procedures, John Wiley & Sons, New York 1974.
M. Rückschloß, Ph. D. Thesis, Tech. University Munich 1993.
B. Delley and E. F. Steigmeier, Phys. Rev. B 47, 1397 (1993).
N. F. Mott, E. A. Davis, Electronic Processes in Non-Crystalline Materials, Clarendon Press, Oxford 1979.
F. Koch, V. Petrova-Koch, T. Muschik, A. Nikolov and V. Gavrilenko, MRS Symp. Proc. 283 (Fall Meeting, Boston, Dec. 1992, in press).
V. Gavrilenko, P. Vogl and F. Koch, MRS Symp. Proc. 283 (Fall meeting, Boston Dec. 1992, in press).
Acknowledgments
We should like to thank Prof. F. Koch and his coworkers for many stimulating discussions. This work has been supported in part by the Deutsche Forschungsgemeinschaft.
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Veprek, S., Rückschloß, M., Landkammer, B. et al. Photoluminescence from Nanocrystalline Silicon Prepared by Plasma CVD and Oxidation. MRS Online Proceedings Library 298, 117–122 (1993). https://doi.org/10.1557/PROC-298-117
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DOI: https://doi.org/10.1557/PROC-298-117