Abstract
Using holography and wet chemical etching, a grating of period 450nm and depth of 15nm was fabricated on a n-type GaAs substrate having a doping of 1016 cm-3. A 30 nm layer of Au was deposited on the substrate forming a Schottky contact. The ohmic back contact is an alloy of Ni, Au and Ge. These devices were optically and electrically characterized.
Optical characterization was done using a polarized 632.8 nm HeNe laser. Reflectivity measurements for complete angular scans with output currents were determined. It was observed that as reflectivity dropped to a minimum, at a specific incident angle, the output current peaked. This was attributed to excitation of surface plasma oscillations in the grating, allowing greater photon absorption in the depletion region. This was observed only when the incident electric field was p-polarized and normal to the orientation of the grating, thus satisfying the surface plasma resonance conditions.
Under the above conditions, it was observed that in a grating coupled photodetector a higher quantum efficiency can be achieved.
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References
Y.Y. Teng and E.A. Stern, Physical Review Letters 19, 511, (1967).
R.H. Bjork, Y.Y. Teng and A.S. Karakashian, Physics Letters 37A, 27, (1971).
R.H. Bjork, A.S. Karakashian and Y.Y. Teng, Physical Review B9, 1934, (1974).
A.S. Karakashian, Physics Letters 85A, 463, (1981).
J. Derov, Y.Y. Teng and A.S. Karakashian, Physics Letters 95a, 197, (1983).
S.R.J. Brueck, V. Diadiuk, T. Jones and W. Length, Applied Physics Letters 46, 915, (1985).
K. Berthold, W. Beinstingl, R. Berger and E. Gornik, Applied Physics Letters 48, 526, (1986).
M. Yamashita and M. Tsuji, Journal Of The Physical Society Of Japan 52, 2462, (1983).
M. Rahman, A.S. Karakashian and S. Broude, Journal Of Applied Optics 66, 438, (1989).
E.F.Y. Kou and T. Tamir, Applied Optics 27, 4098, (1988).
M. Rahman, A.S. Karakashian, S. Broude and D. Gladden, Applied Optics 30, 2935, (1991).
Shu-Tong Zhou, Zong-Qi Lin and William S.C. Chang, Applied Optics 20, 1270, (1981).
M. Missous, E.H. Rhoderick, D.A. Woolf and S.P. Wilkes, Semiconductor Science & Technology 7(2), 218 (1992).
Acknowledgement
The authors would like to thank Dr.William Goodhue of The Lincoln Laboratories, Massachusetts Institute of Technology, Lexington, MA for helping us with the design and fabrication of the grating coupled photodetectors and for providing invaluable information and.insight on the various fabrication techniques employed.
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Krishnaswami, K., Karakashian, A.S. & Wong, C. Characterization of nGaAs-Au Schottky Diodes as Grating Coupled Photodetectors. MRS Online Proceedings Library 281, 701–707 (1992). https://doi.org/10.1557/PROC-281-701
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DOI: https://doi.org/10.1557/PROC-281-701