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Thin Film on Asic - A Novel Concept for Intelligent Image Sensors

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Abstract

Two different pixel detectors have been fabricated, each of them consisting of an a-Si:H based photodiode layer on top of a crystalline silicon integrated circuit. Both sensors are arranged in a matrix and addressed columnwise, providing parallel readout of the matrix rows or optional random access. One sensor is an a-Si:H detector / x-Si switching transistor combination with 256 x 256 pixels and a pixel size of 100μm x 100μm. The signal transport in the array is examined, demonstrating its capability of very fast information readout. The second sensor, which consists of an array of 32 x 32 pixels on a 5μm PMOS ASIC, performs digital contour extraction. Experimental data on the performance of the intelligent array are also reported.

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Acknowledgement

The authors would like to thank E. Cornil and E. Turlot for the deposition of the nip structure and J. Plankert for the preparation of the ITO layer.

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Authors and Affiliations

  1. Center for Sensor Systems, University of Siegen, W-5900 Siegen, Germany

    H. Fischer, J. Schulte, J. Giehl, M. BÖhm & J. P. M. Schmitt

  2. F-91124, Palaiseau Cedex, France

    J. P. M. Schmitt

Authors
  1. H. Fischer
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  2. J. Schulte
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  3. J. Giehl
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  4. M. BÖhm
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  5. J. P. M. Schmitt
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Fischer, H., Schulte, J., Giehl, J. et al. Thin Film on Asic - A Novel Concept for Intelligent Image Sensors. MRS Online Proceedings Library 258, 1139–1144 (1992). https://doi.org/10.1557/PROC-258-1139

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  • DOI: https://doi.org/10.1557/PROC-258-1139

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