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Low Loss Rib-Waveguides in SOI

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Abstract

The realization of single-mode rib-waveguides with dimensions of several micrometers in Silicon-On-Insulator (SOI) is reported. The predicted monomode behaviour is confirmed by comparison of a simulated and a measured nearfield intensity distribution. Waveguide losses below 0.5dB/cm were obtained at wavelengths of 1.3μm and 1.55μm, respectively, independent of the polarization state.

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Acknowledgements

The authors would like to thank G.Burbach from Fraunhofer Institut für Mikroelektronische Schaltungen und Systeme Duisburg for providing the SIMOX-SOI wafer. Thanks are also addressed to B. Kranzusch, K. Kießling, W. Kauert and B. Malik for sample preparation. Parts of this work have been sponsored by Siemens AG.

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Authors and Affiliations

  1. Technische Universität Berlin, Institut für Hochfrequenztechnik, Einsteinufer 25, D-1000, Berlin 10, Germany

    J. Schmidtchen, B. Schüppert, A. Splett & K. Petermann

Authors
  1. J. Schmidtchen
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  2. B. Schüppert
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  3. A. Splett
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  4. K. Petermann
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Schmidtchen, J., Schüppert, B., Splett, A. et al. Low Loss Rib-Waveguides in SOI. MRS Online Proceedings Library 244, 351–355 (1991). https://doi.org/10.1557/PROC-244-351

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  • DOI: https://doi.org/10.1557/PROC-244-351

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