Abstract
We grew selectively doped heterostructures on a Si substrate by metalorganic vapor phase epiaxy (MOVPE) for the first time and fabricated high electron mobility transistors (HEMTs). The conventional selective dry etching process to fabricate enhancement and depletion mode HEMTs on the same wafer, can be used without changing any process conditions. We evaluated the side-gate effect and obtained a critical voltage of 8V. This is large enough for LSI applications. We fabricated HEMTs on two kinds of GaAs-on-Si substrates. One had a small etch pit density (EPD) and poor surface morphology. The other had a large EPD, and better surface morphology. We compared the characteristics of devices on these two substrates, and the degradation of their characteristics was larger for the substrate with a small EPD and poor surface morphology. We conclude that improvement of surface morphology is more important than reduction of dis-location density. For the substrate with better surface morphology, maximum transconductance and K-value, for a gate length of 1 fum were 91% and 84% those of on-GaAs devices.
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For examples see; Heteroepitaxy on Si; Fundamentals, Structure and Devices, C. W. Wu, V. D. Mattera and A. C. Gossard, eds., (Mater. Res. Soc. Symp. Proc. 145, Pittsburgh, 1989).
H. K. Choi, B. Y. Tsaur, G. H. Metze, G. W. Turner and J. C. Fan, IEEE Electron Device Lett. EDL-5, 207 (1984).
T. Ishida, T. Nonaka, C. Yamaguchi, Y. Kawarada, Y. Sano, M. Akiyama and K. Kaminishi, IEEE Electron Devices ED-32, 1037 (1985).
M. I. Aksun, H. Morkoc, L. F. Lester, K. H. G. Duh, P. M. Smith, P. C. Chao, M. Longerbone and L. P. Erickson, Appl. Phys. Lett. 49, 1654 (1986).
N. Chand, F. Ren, S. J. Pearton, N. J. Shah, and A. Y. Cho, IEEE Electron Device Lett. EDL-8, 185 (1987).
H. Shichijo, R. J. Matyi, and A. H. Taddiken, IEEE Electron Devices Lett. EDL-9, 444 (1988).
T. Ma, D. Ueda, W.-S. Lee, J. Adkisson, and J. S. Harris,Jr., IEEE Electron Device Lett. EDL-19, 657 (1988).
M. N. Charasse, B. Bartenlian, B. Gerard, J. P. Hirtz, M. Laviron, A. M. de Parscau, M. Derevonko and D. Delagebeaudeuf, Jpn. J. Appl. Phys. 28, L1896 (1989).
T. Egawa, S. Nozaki, T. Soga, T. Jimbo and M. Umeno, Jpn. J. Appl. Phys. 29, L2417.
R. Fischer, W. Kopp, J. S. Gedymin and H. Morkoc, IEEE Trans. Electron Device Letter. EDL-33, 1407 (1986).
H. Noge, H. Kano, M. Hashimoto and I. Igarashi, in Heteroepitaxy on Si; Fundamentals, Structure and Devices, H. K. Choi, R. Hull, H. Ishiwara and R. J. Nemanich eds, (Mater. Res. Soc. Symp. Proc. 116, Pittsburg, 1988), p. 199.
N. Chand, F. Ren, J. P. Van der Ziel and Y. k. Chenin, in III-V Heterostructures For Electronic/Photonic Devices, C. W. Wu, V. D. Mattera and A. C. Gossard, eds., (Mater. Res. Soc. Symp. Proc. 145, 1989), p. 287
H. Tanaka, N. Tomesakai, H. Itoh, T. Ohori, K. Makiyama, T. Okabe, M. Takikawa, K. Kasai and J. Romeno, Jpn. J. Appl. Phys., 29 (1990) 10.
M. Akiyama, Y. Kawarada and K. Kaminishi, Jpn. J. Appl. Phys. 23, L843 (1984)
T. Eshita, presented at the 7th International Conference on Vapour Growth and Epitaxy, NAGOYA, Japan No. 16pCL07, 1991 (unpublished)
J. W. Lee, H. Shichijo, H. L. Tsai and R. J. Matyi, Appl. Phys. Lett. 50, 31 (1987).
C. Choi, N. Otsuka, G. Munns, R. Houdre, H. Morkoc, S. L. Zhang, D. Levi and M. V. Klein, Appl. Phys. Lett. 50, 992 (1987).
M. Suzuki, S. Notomi, M. Ono, N. Kobayashi, E. Mitani, K. Odani, T. Mimura and M. Abe, ISSCC Dig. Tech. Papers (1991) 48.
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Ohori, T., Kikkawa, T., Suzuki, M. et al. Fabrication of Hemt-on-Si by Movpe for Lsi Applications. MRS Online Proceedings Library 240, 505–510 (1991). https://doi.org/10.1557/PROC-240-505
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DOI: https://doi.org/10.1557/PROC-240-505