Abstract
In Ion Microtomography (IMT), material densities are determined from the energy lost by ions as they pass through a specimen. For fine-scale measurements with micron-size beams, mechanical stability and precision of motion can impact the quality of the reconstruction. We describe several preprocessing procedures used to minimize imperfect specimen manipulation, including adjustment of the center of mass motion in sinograms and correction for vertical translations. In addition, the amount of noise in the reconstruction is reduced by utilizing median (as opposed to mean) ion energy loss values for density determinations. Furthermore, particular portions of the sampled image can be enhanced with minimal degradation of spatial resolution by a judicial choice of spatial filter in the reconstruction algorithm. The benefits and limitations of these preprocessing techniques are discussed.
This is a preview of subscription content, log in via an institution to check access.
Similar content being viewed by others
References
A. E. Pontau, A. J. Antolak, D. H. Morse, A. A. Ver Berkmoes, J. M. Brase, D. W. Heikkinen, H. E. Martz and I. D. Proctor, Nuc. Inst. Meth. B40.41 (1989) 646.
A. E. Pontau, A. J. Antolak, D. H. Morse, Nuc. Inst. Meth. B (1990) in press.
F. Ziegler, Handbook of Stooping Cross-sections for Energetic Ions in all Elements Pergamon Press, New York, 1980.
S. G. Azevedo, D. J. Schneberk, J. P. Fitch, H. E. Martz, LLNL Report UCRL-102615, IEEE Trans. Nuc. Sci., Vol.37, -4 (Aug. 1990), 1525–1540.
J. C. Overly, R. M. S. Schofield, J. D. MacDonald, and H. W. Lefevre, Nucl. Inst. Meth.B30 (1988) 337.
I. D. Proctor, J. C. Davis, M. R. Eaton, J. I. Garibaldi, T. L. Moore, B. J. Schumacher, J. R. Southon, and T. A. Zimmerman, Nucl. Inst. Meth.A268 (1988) 344.
D. J. Schneberk, H. E. Martz, S. G. Azevedo, M. Skeate, LLNL Report UCRL-101264, (1989), and The American Society for Nondestructive Testing Topical Conference on Industrial Computerized Tomograohy Topical Proceedings, July 25–27, Seattle, WA, Am.Soc.for NDT, Columbus OH (1989)609.
Acknowledgements
This work has been supported by the U. S. Department of Energy at Lawrence Livermore National Laboratory under contract W-7405-ENG-48, and at Sandia National Laboratories, Livermore under contract DEAC04-76POO789. We appreciate the interactions with S. G. Azevedo of the LLNL Non-Destructive Evaluation Group, J. C. Davis, D. W. Heikkinenn, I. A. Proctor, and M. Roberts of the LLNL Center for Accelerator Mass Spectrometry, and D. Ciarlo of LLNL who provided the silicon specimen.
Author information
Authors and Affiliations
Rights and permissions
About this article
Cite this article
Weirup, D.L., Pontau, A.E., Antolak, A.J. et al. Preprocessing of Ion Microtomography Data for Improved Reconstruction Quality. MRS Online Proceedings Library 217, 143–149 (1990). https://doi.org/10.1557/PROC-217-143
Published:
Issue Date:
DOI: https://doi.org/10.1557/PROC-217-143