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Measuring Fatigue in PZT Thin Films

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Abstract

Small signal dielectric response is reported for a variety of PZT thin film samples. Small and large signal responses, recorded simultaneously during the fatiguing of PZT thin films, are used to identify distinct fatigue mechanisms. Microcracking or electrode delamination less than 100 Å is sufficient to explain the high correlation between the dielectric permittivity and remanent polarization during fatigue.

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Authors and Affiliations

  1. Physics Department, Queen’s University, Kingston, Ontario, Canada, K7L 3N6

    D.J. Johnson, D.T. Amm, E. Griswold, K. Sreenivas, G. Yi & M. Sayer

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  1. D.J. Johnson
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  2. D.T. Amm
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  3. E. Griswold
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  4. K. Sreenivas
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  5. G. Yi
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  6. M. Sayer
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Johnson, D., Amm, D., Griswold, E. et al. Measuring Fatigue in PZT Thin Films. MRS Online Proceedings Library 200, 289–295 (1990). https://doi.org/10.1557/PROC-200-289

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  • DOI: https://doi.org/10.1557/PROC-200-289

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