Abstract
Thin-layers of lithium niobate were deposited on polycrystalline platinum and (001) sapphire. Preferred orientation was observed by x-ray diffraction measurements, and confirmed by x-ray rocking curve studies. The orientation was [006] LiNbO3 with [111] Pt and [001] Al2O3. Dielectric data are reported for grain oriented LiNbO3 as a function of frequency for layer thicknesses from 0.15 to 0.70 μm.
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References
S. Miyazawa, Appl. Phys. Lett. 23 (4), 198 (1973).
R. A. Betts and C. W. Pitt, Electronics Letters 21 (21), 960 (1985).
G. H. Hewig, et al., Thin Solid Films 88, 67 (1982).
T. Kanata, et al., J. Appl. Phys. 62 (7), 2989 (1987)
P. R. Meek, et al., Thin Solid Films 141, 251 (1986).
D. J. Eichorst and D. A. Payne, in Better Ceramics Through Chemistry III, Mat. Res. Soc. Symp. Proc., 121, 773 (1988).
M.I.Yavskayaetal., J.Mat.Sci. 23 395 1988
S. I. Hirano and K. Kato, Adv. Ceram. Mat. 3, 503 (1988).
D. P. Partlow and J. Greggi, J. Mater. Res. 2, 595 (1987).
R. S. Weis and T. K. Gaylord, Appl. Phys. A 37, 191 (1985).
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Hagberg, D.S., Payne, D.A. Grain-Oriented Lithium Niobate Thin-Layers Prepared by Sol-Gel Methods. MRS Online Proceedings Library 200, 19–24 (1990). https://doi.org/10.1557/PROC-200-19
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DOI: https://doi.org/10.1557/PROC-200-19