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A Mew Variable Angle Ft—ir Ellipsometer

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Abstract

Use of a Fourier—transform interferometer integrated with a variable incidence angle ellipsometer extends the spectral range and the capabilities of spectroscopic ellipsometry into the infrared. With a spectral range of 600 to 6600 cm—1, thick layers, such as epitaxial doped layers and polymers can be analysed.

A full description of this novel instrument will be given. Incidence angle can be variedautomatically to enhance signal/noise and the ellipsometric data can be obtained together with vibrational absorption bands information to give a characteristic “fingerprint ” of the layers.

Examples of spectra of HCN polymer on nickel, DMHS on aluminium and PMMA on silicon willbe presented for various incidence angles and layer thickness.

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References

  1. J.R BEATTIE Phil. Mag. 46 235 (1955)

  2. R.W STOBIE, B.RAO, and M.J. DIGNAM Applied Optics Vol 14, No 4, (1975) 999

  3. A.ROSELER Infrared Physics 21 349 (1981)

  4. M.J. DIGNAM, B.RAO, M. MOSKOVITS, and R.W. STOBIE Can. J. Chem. 49, 1115 (1971)

    Article  CAS  Google Scholar 

  5. A.E MARTIN Vol 9 in Vibrational Spectra and Structure Ed J.R Durig, Elsevier.

  6. G.JUNGK and A. ROSELER Phys.Stat.Sol (b) 137, 117, (1986)

  7. S.ANDRIEU, F. ARNAUD D’AVITAYA Surface Science 219 (1989) 277 – 293

  8. R.BENFEHRAT,B.DREVILLON and P.ROBIN MRS BOSTON Fall Meeting 1–6 Dec 1986.

  9. B.DREVILLON and R.BENFERHAT J.Appl.Phys. 63 (1988) 5088

  10. F.FERRIEU and R.A.B DEVINE To be published in J.Non-Crystalline Solids

  11. F.FERRIEU Rev. Sci. Instrum. 60 (1989) 3212

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Authors and Affiliations

  1. Sopra, 26/68 Rue Pierre Joigneaux, 92270, Bois—Colombes, France

    J. L. Stehle, O. T. Thomas, J. P. Piel, P. Evrard & J. H. Lecat

  2. Aries/Qei, 5A1 Damonmill Square, 01742, Concord, MA, USA

    L. C. Hammond

Authors
  1. J. L. Stehle
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  2. O. T. Thomas
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  3. J. P. Piel
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  4. P. Evrard
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  5. J. H. Lecat
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  6. L. C. Hammond
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Stehle, J.L., Thomas, O.T., Piel, J.P. et al. A Mew Variable Angle Ft—ir Ellipsometer. MRS Online Proceedings Library 171, 349–354 (1989). https://doi.org/10.1557/PROC-171-349

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  • DOI: https://doi.org/10.1557/PROC-171-349

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