Ion Implantation-Induced Amortization of Ceramic Oxides

Abstract

A mechanism of amorphization by ion implantation in ceramic oxides is studied using a rate theory approach. It is proposed that the production of highly localized lattice distortions causes lattice destabilization and the ensuing transition to the amorphous state. These distortions can be caused by a large point defect buildup. It is argued that point defect retention occurs because of the impossibility of producing antisite defects. It is proposed that point defects on each sublattice can shield or trap point defects on the other sublattice. Similarly, metallic impurities may shield oxygen vacancies or trap oxygen interstitial ions, preventing anion Frenkel pairs from recombining. These effects are modeled in a-alumina for low temperature implantations (e.g., around 78 K), where point defects are immobile. It is shown that, at these temperatures, recombination is strongly hindered by the radiation-induced point defects themselves, rather than by the implanted impurities. The high point defect concentration attained by this mechanism is sufficient to raise the free energy of the crystal above the free energy of the amorphous solid.