Abstract
The fine probe forming capabilities of an analytical electron microscope combined with the development of related spectroscopies, diffraction and imaging techniques, makes it possible to obtain structural and chemical information from multiphase materials at high spatial resolution. These microanalytical methods are described with relevant examples from our studies of compounds in the A12O3-AIN pseudobinary system, a potential window material, low-pressure synthesized diamond, diamond-like carbon and hydrocarbon films. A comprehensive example of the characterization of a novel AION poltypoid structure (32H), illustrative of both the information content obtainable from these techniques at any particular level of resolution and the need to employ all the complementary methods of analysis, is discussed. Efforts to characterize a variety of diamond-like carbon films by the measurements of both the low-loss plasmon resonances and the fine strcture in the core-loss edges observable in the energy-loss spectrum, to obtain sp3/sp2 ratios are outlined. The electronic structure of thin film diamonds, synthesized by a plasma enhanced chemical vapour deposition method, has been shown to be in agreement with band structure calculations.
Similar content being viewed by others
References
B. F. Buxton, J. A. Eades, J. W. Steeds, G. M. Rackham, Phil. Trans. Roy. Soc. A281, 171 (1976).
G. Cliff and G. W. Lorimer, J. Micros. 103, 203 (1975).
K. M. Krishnan and C. J. Echer, in Analytical Electron Microscopy, D.C. Joy editor, San Francisco Press, 99 (1987).
R. F. Egerton, EELS in the EM, Plenum Press, New York (1986).
H. Raether, Excitations of Plasmons and Interband Transitions by Electrons, Springer Verlag Press, New York (1980).
T. M. Harnett et al., Cearmic Engineering and Science, 3, 67 (1982).
J. W. McCauley and N. D. Corbin, J. Am. Cer. Soc. 62, 476 (1979).
K. H. Jack, J. Mat. Sci. 11, 1135 (1976).
J. Steeds in Introduction to AEM, edited by Hren, Goldstein and Joy, Plenum Press, New York (1979).
M.A. O’Keefe and R. Kilaas, in Image and Signal Processing in Electron Microscopy, P. W. Hawkes, F. P. Ottensmeyer, A. Rosenfeld, W. O. Saxton editors, 225 (1988).
J. C. Angus and C. H. Hayman, Science 241, 913 (1988).
R. C. DeVries, Ann. Rev. Mater. Sci. 17, 161 (1987)
V. P. Varnin, I. G. Teremenskaya, D.V. Fedoseev and B. V. Deryaguin, Sov. Phys. Dokl. 29, 419 (1984).
H. Tsai and D. B. Bogey, J. Vac. Sci. Tech. A5, 3287 (1987).
D. S. Knight and W. B. White, J. Mater. Res. 4, 385 (1989).
S. R. Kasi, H. Kang, J. W. Rablais, J. Chem. Phys. 88, 5914 (1988).
M. Rubin, private communication.
J. Fink et al, Phys. Rev. B30, 4713 (1984).
A. R. Badzian, T. Badzian, R. Roy, R. Messier, K.E. Spear, Mat. Res. Bull. 23, 531 (1988).
K. M. Krishnan and C.J. D. Hetherington, unpublished data.
B. E. Williams and J. T. Glass, J. Mat. Res. 4, 373 (1989).
X. Weng, P. Rez and H. Ma, Phys. Rev B, in press
D. Pickrell, private communication.
Author information
Authors and Affiliations
Rights and permissions
About this article
Cite this article
Krishnan, K.M. Microanalytical and Structural Characterization of Optical Materials By Electron Microscopy and Related Specitroscopies. MRS Online Proceedings Library 152, 151–162 (1989). https://doi.org/10.1557/PROC-152-151
Published:
Issue Date:
DOI: https://doi.org/10.1557/PROC-152-151